Optical element defect detection system and detection method

Abstract

The invention discloses an optical element defect detection system and detection method, the system comprises a lathe bed supporting module, a vibration isolation module, a positioning clamping module, a defect detection module, a defect analysis module, a scanning motion module and an electrical control module, and each module completes the corresponding function. The method comprises the following specific working steps: starting equipment and software, carrying out system initialization setting, setting system parameters, placing a tested sample, setting measurement parameters, scanning and testing the sample, collecting detection data, analyzing defect types, evaluating defect characteristics and closing a result output system. According to the invention, the problems of defect morphology misjudgment and defect positioning errors possibly caused by some personnel reasons in manual inspection are solved, the occurrence rate of defect positioning errors is reduced, and the defect detection accuracy of the large-aperture optical component is further improved.

Description

technical field [0001] The invention relates to the field of ultra-precision processing and detection of optical components, in particular to micron / submicron defect testing during and after polishing of large-diameter optical components. Background technique [0002] The rapid development of modern large-scale optical engineering puts forward strict requirements on the processing quality of optical components. Especially in the manufacturing process of large-diameter optical components, it is necessary to use the inspection process to detect defects on the polished surface of optical components to improve the pass rate of optical component processing, which requires large-diameter, high surface accuracy, ultra-smooth, and low-defect requirements. According to the different inspection subjects, the inspection process can be divided into equipment inspection process and manual inspection process. The equipment inspection process is mainly used for small-caliber sample proces...

AI Technical Summary

Problems solved by technology

The manual inspection process requires the inspectors to judge the defect morphology characteristics with the help of inspection tools and manually mark the defects. This process relies heavily on the experience of the inspectors.

Although manual inspection can detect defects in time and greatly improve the qualified rate of finished products of optical components, however, in the process of manual inspection, it is inevitable that there will be some misjudgments of defect appearance and defect positioning errors caused by human factors.

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