Method and system for remotely controlling power supply of solid-state radio frequency power supply

Abstract

The invention discloses a method and a system for remotely controlling power supply of a solid-state radio frequency power supply. The method comprises the following steps: the remote control system analyzes the running states of a first load module and the first solid-state radio frequency power supply based on an output reflection power value of the first solid-state radio frequency power supply and an output radio frequency signal of the first load module; when the remote control system judges that the operation state is in a safe state, the first solid-state radio frequency power supply adjusts the working frequency of the power amplifier based on the frequency adjustment signal, and supplies power to the first load module based on the power supply output by the power amplifier; and when the remote control system judges that the operation state is in an unsafe state, the first load module isolates the power supply output by the first solid-state radio frequency power supply. In the embodiment of the invention, the related parameter values on the load module are obtained through the remote control system based on the wireless signal, and the corresponding equipment is controlled in a centralized manner, so that the control efficiency is improved, and the hardware cost is reduced.

Description

technical field [0001] The invention relates to the technical field of power supplies, in particular to a method and system for remotely controlling the power supply of a solid-state radio frequency power supply. Background technique [0002] Solid-state RF power supply is generally used as RF source for exciting plasma devices. By matching with the load system, the energy is used for plasma excitation to form a plasma torch, which is used in electroplating, spectrometer and other industries. However, real-time status monitoring and protection of the instrument is crucial. Due to the influence of diversification and different models of the load system and solid-state RF power supply, the existing system cannot realize corresponding remote control for different load systems and corresponding solid-state RF power supplies based on a remote control system, making the load system and solid-state RF power supply The control between power supplies is a one-way isolated control mo...

AI Technical Summary

Problems solved by technology

Due to the influence of diversification and different models of the load system and solid-state RF power supply, the existing system cannot realize corresponding remote control for different load systems and corresponding solid-state RF power supplies based on a remote control system, making the load system and solid-state RF power supply The control between power supplies is a one-way isolated control mode, which cannot achieve centralized remote control, so that in the application scenario where multiple solid-state RF power supplies supply power to multiple load systems, they can only be controlled individually, which makes the control efficiency low. Repeated input costs are high

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