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Nitrogen trifluoride production pollution discharge equipment and process method

A nitrogen trifluoride and process method technology, applied in chemical instruments and methods, separation methods, dispersed particle separation, etc., can solve problems such as affecting production progress, strong corrosion, complicated operation procedures, etc., and achieve strong production continuity and economical efficiency. The effect of the amount of alkali used

Pending Publication Date: 2022-01-07
PERIC SPECIAL GASES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Catalytic hydrolysis is the reaction of nitrogen trifluoride and water to generate hydrofluoric acid under the action of a catalyst, which has a strong corrosive effect on the reactor and the operation process is complicated
The prior art discloses a defluorination agent (CN103961985A) for decomposing nitrogen trifluo

Method used

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  • Nitrogen trifluoride production pollution discharge equipment and process method
  • Nitrogen trifluoride production pollution discharge equipment and process method
  • Nitrogen trifluoride production pollution discharge equipment and process method

Examples

Experimental program
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Effect test

Embodiment 1

[0028] Nitrogen trifluoride production blowdown equipment in the present embodiment, as figure 1 As shown, it includes an electrolytic cell 2, the anode gas outlet of the electrolytic cell 2 is connected with the air inlet at the bottom of the cooler 3 through a pipeline, and the gas outlet at the top of the cooler 3 is connected with the air inlet at the top of the balance tank 4 through a pipeline, and the The air outlet at the top of the balance tank 4 is connected with the air inlet at the top of the negative pressure tank 5 through a pipeline, and the air outlet at the top of the negative pressure tank 5 is connected with the air inlet at the top of the cold trap 6 through a pipeline, and an air outlet of the cold trap 6 passes through Pipeline is connected with crude product tank 7, and another gas outlet of described cold trap 6 is connected with cracking tower 8 bottom gas inlets by pipeline, and described cracking tower 8 top gas outlets are connected with alkali washi...

Embodiment 2

[0030] Adopt the equipment among the embodiment 1 to carry out the processing method of nitrogen trifluoride production blowdown in the present embodiment and comprise the following steps:

[0031] S1, using molten NH in the electrolytic cell 2 3 -xHF is used as the electrolyte system to electrolyze nitrogen trifluoride gas, the molar ratio of the electrolyte system in the electrolytic cell 2 is x=2.5, the electrolysis temperature is 100°C, and the pressure is 0.01MPa;

[0032] S2. The electrolytic gas produced by the anode of the electrolytic cell 2 enters the cooler 3 through a pipeline for cooling. The temperature of the cooler 3 is -100° C. and the pressure is 0 MPa. Part of the HF in the electrolytic gas is cooled in the cooler. 3 is liquefied to obtain a cooled gas;

[0033] S3, passing the cooled gas generated in S2 through the balance tank 4, the negative pressure tank 5 and the cold trap 6 in sequence, the temperature of the balance tank 4 is 20°C, and the pressure i...

Embodiment 3

[0043] Adopt the equipment among the embodiment 1 to carry out the processing method of nitrogen trifluoride production blowdown in the present embodiment and comprise the following steps:

[0044] S1, using molten NH in the electrolytic cell 2 3 -xHF is used as the electrolyte system to electrolyze nitrogen trifluoride gas, the molar ratio of the electrolyte system in the electrolytic cell 2 is x=3, the electrolysis temperature is 90°C, and the pressure is 0MP;

[0045] S2. The electrolytic gas produced by the anode of the electrolytic cell 2 enters the cooler 3 through a pipeline for cooling. The temperature of the cooler 3 is -70° C., and the pressure is -0.012 MPa. Part of the HF in the electrolytic gas is Cooler 3 is liquefied to obtain cooled gas;

[0046] S3, passing the cooled gas generated in S2 through the balance tank 4, the negative pressure tank 5 and the cold trap 6 in sequence, the temperature of the balance tank 4 is 20°C, and the pressure is -0.002MPa, and th...

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Abstract

The invention discloses nitrogen trifluoride production pollution discharge equipment which comprises an HF storage tank, an electrolytic bath, a cooler, a balance tank, a negative pressure tank and a cold trap which are sequentially arranged, two gas outlets of the cold trap are connected with a crude product tank and a cracking tower respectively, and the cracking tower is sequentially connected with an alkaline washing tower and a reduction tower. The invention also discloses a process method for nitrogen trifluoride production pollution discharge by using the equipment, which comprises the following steps: preparing nitrogen trifluoride gas in the electrolytic bath through electrolysis, cooling electrolytic gas generated by an anode of the electrolytic bath in the cooler, sequentially feeding the cooled electrolytic gas into the balance tank, the negative pressure tank and the cold trap, feeding crude nitrogen trifluoride gas discharged from a gas outlet of the cold trap into the crude product tank, and feeding discharged foreign gas into the cracking tower and conducting treatment by the alkaline washing tower and the reduction tower; and feeding HF liquid generated in the cooler and the cold trap into the HF storage tank for reuse by the electrolytic bath. The nitrogen trifluoride gas in the impurity gas is completely decomposed, the final exhaust gas is nitrogen and oxygen, and no pollution is caused to the environment.

Description

technical field [0001] The invention belongs to the technical field of nitrogen trifluoride production, and in particular relates to nitrogen trifluoride production sewage equipment and a process method. Background technique [0002] NF 3 Gas is widely used in the electronics industry as an etchant and cleaning agent. In recent years, domestic semiconductor companies have accelerated the pace of R&D and production, making NF 3 demand is increasing year by year. [0003] The cooler and ultra-low temperature cold trap are important equipment for the production of nitrogen trifluoride gas. During the production process, HF will be emitted. HF is highly corrosive, and skin contact will cause burns, and fluoride ions can damage nerves. The fluorine-containing wastewater in the industry mainly adopts the method of calcium hydroxide or calcium salt precipitation. The prior art discloses a semiconductor fluorine-containing wastewater treatment system and process (CN111732227A), wh...

Claims

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Application Information

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IPC IPC(8): B01D53/68B01D53/54B01D53/75B01D53/00C25B1/26C25B1/50C25B9/09C25B15/08
CPCB01D53/68B01D53/75B01D53/54B01D53/002C25B1/26C25B1/50C25B9/09C25B15/083B01D2257/2027B01D2257/204
Inventor 王永迪冀延治宋富财郝春辉李海军岳立平郑阳光潘姝言
Owner PERIC SPECIAL GASES CO LTD
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