Bionic flexible pressure capacitance sensor of logarithmic response function

Abstract

The invention discloses a bionic flexible pressure capacitance sensor with a logarithmic response function, and belongs to the field of pressure sensors. Two flexible insulating films are coated with conducting layers to serve as an upper plate electrode and a lower plate electrode of the capacitive sensor, an elastic dielectric film is filled between the upper plate electrode and the lower plate electrode, the elastic coefficient of the cross section of the elastic dielectric film gradually changes from top to bottom, when applied pressure is small, the deformation of the elastic dielectric film corresponding to unit pressure is large, and the capacitance variation is relatively large; and when the applied pressure is gradually increased, although the total capacitance is also increased, the deformation increment corresponding to the unit pressure is gradually reduced, the capacitance increment corresponding to the unit pressure is gradually reduced, and the capacitance and the pressure are in an approximate logarithmic relationship. The bionic flexible pressure capacitance sensor can sense very small pressure, can measure when the pressure is very large, does not have saturation, is wide in measuring range, accords with the bionic principle, and can be independently used or used by forming an N * N matrix.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a bionic flexible pressure capacitance sensor with a logarithmic response function. Background technique [0002] Traditional bionic flexible pressure capacitive sensors such as figure 2 shown. The upper surface flexible insulating film 1, the upper electrode conductive layer 2, the elastic dielectric film 6 with a uniform elastic coefficient from top to bottom in the cross section, the lower electrode conductive layer 4, and the lower surface flexible insulating film 5; the upper electrode conductive layer 2 has a leading electrode line 2-1. The conductive layer 4 of the lower electrode has a lead-out electrode wire 4-1, and the electrode wire 2-1 and the electrode wire 4-1 are connected to the measurement circuit to measure the change of capacitance with pressure. [0003] The capacitance of this bionic flexible pressure capacitive sensor has a linear relationship with pressur...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the capacitance of the bionic flexible pressure capacitance sensor has a linear relationship with the pressure and the measurement range is small in the prior art, and proposes a bionic flexible pressure capacitance sensor with a logarithmic relationship between the capacitance and the pressure. Larger, more in line with the principle of bionics

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