Device and method for monitoring organic matters in environmental gas

Abstract

The invention provides a device and a method for monitoring organic matters in environmental gas. The device comprises a first sampling mechanism, a gas collection mechanism, an analysis unit, a gas carrying mechanism and a sampling pump; the first sampling mechanism is connected with the first end of the gas collection mechanism, the gas carrying mechanism and the sampling pump are respectively connected with the second end of the gas collection mechanism, and the analysis unit is connected with the first end of the gas collection mechanism; the gas collection mechanism is used for adsorbing organic matters in environmental gas in the sampling step and desorbing the organic matters in the analysis step; and the gas carrying mechanism is used for feeding the desorbed organic matters into the analysis unit for detection in the analysis step. In the sampling step, the collecting mechanism adsorbs organic matters in the gas, in the analyzing step, the desorbed organic matters in the gas collecting mechanism are sent into the analyzing unit to be detected by utilizing the gas in the gas carrying mechanism, and the operation is repeated, so that the environmental gas can be monitored in real time, and environmental abnormity can be found in time; and an environment quality basis is provided for product production and organic matter use management.

Description

technical field [0001] The present disclosure relates to the technical field of organic matter detection, in particular to a device and method for monitoring organic matter in ambient gas. Background technique [0002] In the semiconductor field, volatile organic compounds (volatile organic compounds VOC) will form particles or particles on the surface of the wafer (wafer), causing process defects. At present, common organic substances in semiconductor factories include IPA, acetone, ethyl acetate, PGMEA, benzene, toluene, and xylene. Therefore, it is necessary to detect and control VOC in the semiconductor workshop environment. That is, the environment is detected and analyzed by laboratory gas chromatography-mass spectrometry (Gas chromatography-mass spectrometryGC-MS). GC-MS is currently the most commonly used VOC analysis instrument. [0003] The sampling and analysis of the existing analyzer are carried out independently, the sampling needs to be manually carried for...

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Problems solved by technology

[0004] The purpose of the present disclosure is to provide a device and method for monitoring environmental gas organic matter, so as to alleviate the technical problems that the existing sampling and analysis methods take a long time and cannot reflect the quality of the on-site environment in real time, and cannot monitor the environment in real time

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