Microporous ceramic adsorption platform and method for producing imprint-free product based on microporous ceramic adsorption platform

A technology of microporous ceramics and platforms, which is applied in microlithography exposure equipment, optomechanical equipment, photoplate making process of pattern surface, etc. Small, the material is not easy to generate dust, and the chemical properties are stable.

Pending Publication Date: 2022-02-18
华天慧创科技(西安)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Traditional groove adsorption platforms are designed for grooves. The substrate for making optical lenses is ultra-thin glass (thickness 70-140 μm). The groove adsorption platform can easily cause groove-shaped deformation of ultra-thin glass, resulting in The difference in Focus caused by the height difference between the inside and outside of the groove will eventually lead to the difference in the size of the image inside and outside the groove after the photolithography is completed, causing defects

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] A microporous ceramic adsorption platform, comprising an adsorption plate, the adsorption plate is circular, three first through holes are opened in the center of the adsorption plate, and three second through holes are evenly opened on the edge of the adsorption plate;

[0030] The adsorption plate is a microporous ceramic plate. In the microporous ceramic plate, the opening rate is 40%, and the pore size is 10-20 μm.

Embodiment 2

[0032] Except for the following content, all the other contents are the same as in Example 1.

[0033] performance unit microporous ceramics Alumina content (Al2O3) wt% ≥80 Silica content (SiO2) wt% 18 Bulk density g / cm 3

Embodiment 3

[0035] A method for making non-marking products based on the above-mentioned microporous ceramic adsorption platform, comprising the following steps:

[0036] Step 1) using photoresist to carry out pattern photolithography on the adsorption plate;

[0037] Step 2) coating a vinyl film on the surface of the adsorption plate after photoetching;

[0038] Step 3) Soft-baking, exposing and curing the adsorption plate coated with vinyl film in sequence to obtain a non-marking product based on the microporous ceramic adsorption platform.

[0039] The fabrication of the microporous ceramic adsorption platform solves the abnormality of the adsorption imprint on the ultra-thin glass substrate.

[0040] The technology is made using glass-based vinyl, a special type of negative-tone photoresist. Photoresist, also known as photoresist, refers to a resist-etched film material whose solubility changes through irradiation or radiation of ultraviolet light, electron beams, ion beams, X-rays,...

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PUM

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Abstract

The invention discloses a microporous ceramic adsorption platform and a method for producing an imprint-free product based on the microporous ceramic adsorption platform. The microporous ceramic adsorption platform does not contain a traditional groove design so that the ultra-thin glass imprinting technology is achieved, a traditional groove type vacuum adsorption platform is replaced, and when the imprint-free product is produced based on the adsorption platform, pattern photoetching, black glue film coating, soft baking, exposure and curing are sequentially performed to obtain the imprint-free product. The manufacturing process is simple and easy to operate. The equipment matching property, the weight, the flatness, the adsorption effect, the vacuum breaking effect and the particle attachment condition of the manufactured microporous ceramic adsorption platform are verified; and through the same process condition, compared with observation under a dark field accent light after photoetching of a traditional groove adsorption platform and a micropore ceramic adsorption platform, the adsorption imprint of a product made by using the micropore ceramic adsorption platform disappears abnormally.

Description

technical field [0001] The invention belongs to the field of optical lens production, and relates to a microporous ceramic adsorption platform and a method for preparing non-marking products based on the platform. Background technique [0002] Traditional groove adsorption platforms are designed for grooves. The substrate for making optical lenses is ultra-thin glass (thickness 70-140 μm). The groove adsorption platform can easily cause groove-shaped deformation of ultra-thin glass, resulting in The difference in Focus caused by the height difference between the inside and outside of the groove will eventually cause the difference in the size of the image inside and outside the groove after the photolithography is completed, resulting in defects. Contents of the invention [0003] The purpose of the present invention is to overcome the disadvantages of the above-mentioned prior art that the adsorption platform has grooves so that the products prepared based on it have impr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/20G03F7/70716
Inventor 庞军星乔晓光党康康
Owner 华天慧创科技(西安)有限公司
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