Coating device

A coating device and ruler technology, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc., can solve the problems of difficult stripping, time-consuming and laborious, and low efficiency, and achieve improved measurement accuracy, simple process, and high efficiency. high effect

Active Publication Date: 2022-03-01
安徽光智科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But there are also some shortcomings, mainly; low efficiency and high cost
Coating, pre-baking, exposure, development, peeling, cleaning and other processes are not only time-consuming and laborious, but also costly; there are certain limitations, this method is only suitable for cold-evaporated film debugging, not suitable for process debugging that requires heating process; because the photoresist will be cured in a heated environment, it is difficult to peel off, and an effective test step cannot be formed

Method used

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Embodiment Construction

[0042] The drawings illustrate embodiments of the disclosure and it is to be understood that the disclosed embodiments are merely examples of the disclosure, which may be embodied in various forms and therefore specific details disclosed herein should not be construed as limiting. , but merely as a basis for the claims and as a representative basis for teaching one of ordinary skill in the art to variously employ the present disclosure.

[0043] refer to Figure 1 to Figure 7 , the coating device 100 includes a first ring body 1, a second ring body 2 and a cross-shaped scale 3.

[0044] The first ring body 1 has a through hole 11 penetrating through the first ring body 1 along the thickness direction D of the first ring body 1 .

[0045] When viewed along the thickness direction D of the first ring body 1 , the cross-shaped scale 3 is centrally arranged in the through hole 11 . The cross-shaped scale 3 has a central origin portion 31, a first positive-axis scale portion 32, ...

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Abstract

The invention provides a coating device which comprises a first ring body, a second ring body and a cross-shaped ruler, the first ring body is provided with a through hole, and the cross-shaped ruler is arranged in the middle of the through hole. The cross-shaped scale is provided with a central origin part, a first positive-axis scale part, a first negative-axis scale part, a second positive-axis scale part and a second negative-axis scale part, and is provided with a first side and a second side; scales are arranged on the first side of the cross-shaped ruler; the center original point part, the first positive-axis scale part, the first negative-axis scale part, the second positive-axis scale part and the second negative-axis scale part are flush on the second side of the cross-shaped scale, and the side faces, parallel to the thickness direction of the first ring body, of the first positive-axis scale part, the first negative-axis scale part, the second positive-axis scale part and the second negative-axis scale part are straight. The second ring body and the first ring body are stacked and connected together in the thickness direction of the first ring body; the second ring body is provided with an accommodating part which is used for the wafer. Therefore, the thickness measurement precision of the coating film can be improved.

Description

technical field [0001] The present disclosure relates to the field of coating, in particular to a coating device. Background technique [0002] At present, in the field of high vacuum coating, it is an important research and development process to test and debug parameters such as thickness and uniformity of the coated film, because only by accurately testing the parameters such as the actual coating thickness and uniformity, can there be basis for modification and debugging The parameters of the coating program, and then achieve the evaporation of a film with the same thickness as the set thickness and meet the requirements of uniformity and other parameters. The accurate test results can accurately explain the parameters that need to be changed and adjusted in the coating process research and development project, and expose the coating process. problems in . [0003] In the process of measuring and debugging the existing coating process, the film is patterned on the surfa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/545
Inventor 赵龙李海涛李兆营姚浩强
Owner 安徽光智科技有限公司
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