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Measurement Method of Center Thickness of Bilateral Displacement Differential Confocal Lens

A differential confocal and lens center technology, which is applied in the non-contact high-precision measurement of lens center thickness, and in the field of bilateral misalignment differential confocal lens center thickness measurement, can solve the problem of complex system structure, assembly process, and large errors. problems, to achieve the effect of improving the focus sensitivity and signal-to-noise ratio, improving the focus precision, and improving the measurement accuracy

Active Publication Date: 2020-08-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

However, two detectors must be used, and the position of the two detectors must be equal to the defocus amount. The system structure and the installation and adjustment process are more complicated, and the error introduced by inaccurate installation and adjustment may be large; after replacing the mirror under test, The amount of defocus of the two detectors may need to be readjusted

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  • Measurement Method of Center Thickness of Bilateral Displacement Differential Confocal Lens
  • Measurement Method of Center Thickness of Bilateral Displacement Differential Confocal Lens
  • Measurement Method of Center Thickness of Bilateral Displacement Differential Confocal Lens

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Embodiment

[0051] as attached Figure 6 As shown, the measurement steps of the method for measuring the central thickness of the bilateral misalignment differential confocal lens disclosed in this embodiment are:

[0052] a) Start the measurement software of the main control computer 24, turn on the laser 28, and the light emitted by the laser 28 passes through the microscope objective lens 29 and the pinhole 30 to form a point light source 1.

[0053] b) Adjust the measured lens 6 so that it has the same optical axis as the measuring objective lens 4 and the collimating lens 3, and the light emitted by the point light source 1 is converged into the measuring beam 5 after passing through the beam splitter 2, the collimating lens 3 and the measuring objective lens 4 On the vertex A of the measured lens 6, the measurement beam 5 reflected by the vertex A of the measured lens 6 passes through the measurement objective lens 4 and the collimator lens 3, and then is reflected by the beam split...

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Abstract

The invention relates to a bilateral malposed differential confocal lens central thickness measurement method and belongs to the technical field of optical precision measurement. According to the invention, in a confocal measurement system, firstly, big and small virtual pinhole detection regions are set by software on an Ellie spot image detected by a CCD and two confocal characteristic curves detected by the big and small virtual pinhole detection regions are sharpened by subtraction processing; secondly, the sharpened confocal characteristic curves are subjected to bilateral malposed differential subtraction processing to obtain axial highly-sensitive differential confocal characteristic curves; then by utilizing the characteristic that zero points of the bilateral malposed differentialconfocal characteristic curves accurately correspond to a focus of the confocal measurement system, high-accuracy fixed-focus locating is carried out on a central thickness measurement vertex position of a measured lens; and finally, by ray tracing compensation calculation, a central thickness of the lens is accurately obtained so as to implement high-accuracy measurement on the central thicknessof the lens. The bilateral malposed differential confocal lens central thickness measurement method has the advantages of high measurement accuracy, high resistance to environment interference, simple structure and the like, and has wide application prospect in the technical field of optical precision measurement.

Description

technical field [0001] The invention relates to a method for measuring the central thickness of a bilateral misalignment differential confocal lens, in particular to a non-contact high-precision measuring method for the central thickness of a lens, and belongs to the technical field of optical precision measurement. Background technique [0002] In the field of optics, the measurement of lens center thickness is of great significance. Lens center thickness is an important parameter in the optical system, and its processing quality will have a great impact on the imaging quality of the optical system. Especially for lenses in high-performance optical systems such as lithography objective lenses and aerospace cameras, it is necessary to precisely adjust the axial gap, radial offset and optical axis deflection angle of the lens according to the curvature radius, refractive index and central thickness of the lens in the lens. adjustment. Taking the objective lens of lithograph...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
CPCG01B11/06
Inventor 赵维谦邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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