Two-axis film sample table for X-ray diffractometer

Abstract

The invention discloses a two-axis film sample table for an X-ray diffractometer, which comprises an adapter seat, an electric lifting sliding table, an electric swinging sliding table and a cushion block, the electric swinging sliding table is connected with the X-ray diffractometer through the adapter seat, the electric lifting sliding table is connected above the electric swinging sliding table, and the cushion block is connected above the electric lifting sliding table. The electric swing sliding table can drive the electric lifting sliding table to swing in the x-axis direction, a cushion block is detachably connected to the upper portion of the electric lifting sliding table, and a film sample is placed on the cushion block. The height adjustment of film samples with different thicknesses can be realized through the electric lifting sliding table and the cushion block, so that the upper surfaces of the film samples can be positioned at the central point of the X-ray diffractometer, the requirements of the X-ray diffractometer for testing the film samples with different thicknesses are further met, the electric swinging sliding table can be used for adjusting the inclination condition of the film samples, and the measurement accuracy is improved. And the surface of the film sample is positioned at a high-precision horizontal position, so that a common diffractometer has the functions of leveling, aligning and testing the film sample.

Description

technical field [0001] The invention relates to the technical field of sample stages, in particular to a two-axis film sample stage for an X-ray diffractometer. Background technique [0002] X-ray diffractometer uses the principle of diffraction to accurately measure the crystal structure, texture and stress of substances, and accurately perform phase analysis, qualitative analysis, and quantitative analysis. As the main means of characterizing the crystal structure of materials, it is widely used in scientific research , inspection and testing, and enterprise-to-product quality control. With the proposal of the Materials Genome Project, X-ray diffractometer has been used more and more as an efficient and non-destructive detection method. [0003] At present, conventional X-ray diffractometers equipped in testing centers are mainly used to test powder samples, and the diffraction pattern of powder samples is a series of concentric Debye rings, so only two-axis diffraction i...

AI Technical Summary

Problems solved by technology

[0004] At present, powder diffractometers do not need to be aligned for powder samples. Conventional powder diffractometers are only equipped with Y-axis and Z-axis, which can move in Y-axis and Z-axis, but cannot meet the testing requirements of thin film samples, especially without the ability to adjust thin film samples. The ability to adjust the flatness of the sample. Therefore, there is an urgent need for a sample stage that can adjust the surface displacement and flatness of the thin film sample on the general powder diffractometer, so that the general X-ray diffractometer can have the function of testing thin film samples of various thicknesses.

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