Scanning photoetching control method and device, equipment and storage medium

Abstract

The embodiment of the invention discloses a control method and device for scanning photoetching, equipment and a storage medium. The scanning photoetching control method comprises the following steps: acquiring a current position of a photoetching device moving to a target surface along a scanning direction; determining a current to-be-exposed light spot image according to the to-be-exposed image and the current position; and adjusting the light spot image projected to the target surface by the photoetching equipment according to the current light spot image to be exposed. According to the scheme, the light spot image of irradiating the target surface by the photoetching equipment is correspondingly adjusted by moving the photoetching equipment to the specific position of the target surface, so that compared with the prior art that the light spot image of projecting the target surface by the photoetching equipment is correspondingly adjusted through time, the problem that the precision of a scanning photoetching motion system is low is avoided; and deviation of the image exposed on the surface of the target is caused. Therefore, according to the scheme, the accuracy of the actual exposure point of scanning photoetching corresponding to the exposed frame image can be improved, and the exposure image deviation is reduced.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of lithography, and in particular, to a control method, device, equipment and storage medium for scanning lithography. Background technique [0002] At present, the displacement command issued by the scanning lithography system corresponds to the image command, that is, each point from point A to point B corresponds to each frame from M frame to N frame, and during the scanning lithography process It is based on time, for example, in scanning lithography movement, set time t to move to point C, and output L frames of images correspondingly. However, due to the low precision of the motion system of scanning lithography, such as the speed fluctuation of the linear motor and the elastic error of the belt mechanism, these factors will cause the motion system to fail to output the corresponding frame image at the set point within the set time. As a result, certain points do not correspond t...

AI Technical Summary

Problems solved by technology

However, due to the low precision of the motion system of scanning lithography, such as the speed fluctuation of the linear motor and the elastic error of the belt mechanism, these factors will cause the motion system to fail to output the corresponding frame image at the set point within the set time. As a result, some points do not correspond to the images of some frames during actual exposure, which makes the exposure image deviate

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