Dark field image storage method using sparse matrix characteristics

Abstract

The invention discloses a dark field image storage method utilizing sparse matrix characteristics. The dark field image storage method comprises the following steps: (1) scanning and imaging a to-be-detected sample by utilizing a dark field imaging system; the dark field imaging system comprises a three-axis displacement table for placing a to-be-detected sample, a light source module for providing inclined irradiation light rays for the to-be-detected sample, an imaging lens group which is positioned right above the to-be-detected sample and is used for receiving scattered light rays, and a CCD (Charge Coupled Device) camera; dark field images formed by the CCD camera are transmitted to the computer for processing, and the computer is further connected with the three-axis displacement table and used for controlling accurate movement of the three-axis displacement table. (2) selectively performing data compression on original image data acquired by the dark field imaging system by using a sparse matrix structure; and (3) carrying out data extraction by using a row unit, and completing the positions of head and tail elements of single-row data through searching and positioning so as to complete the extraction of the whole-row data and further complete the final integral image output. The space storage efficiency and the time index efficiency of the image data can be improved.

Description

technical field [0001] The invention belongs to the field of optical technology, in particular to a dark-field image storage method utilizing the characteristics of a sparse matrix. Background technique [0002] Most dark-field scattering imaging systems adopt schemes such as offsetting the objective aperture, using a ring objective aperture, or oblique illumination to ensure that only the scattered light of the target object is captured by the sensor, which makes it possible to obtain extremely high contrast. Therefore, the dark field imaging system is widely used in optical systems that require high imaging. [0003] Compared with solutions such as AFM (Atomic Force Microscope) and SEM (Scanning Electron Microscope), dark field scattering has great advantages in imaging range. [0004] For example, the Chinese patent document with the publication number CN111292241A discloses a large-aperture optical element sub-area scanning splicing method, including: (1) dividing the a...

AI Technical Summary

Problems solved by technology

With the further improvement of detection requirements, the number of pictures generated by scanning is increasing. The huge amount of data not only increases the cost of corresponding hardware requirements, but also reduces the response speed of the entire system.

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