Focused ion beam sample cleaning method and device
A technology of focusing ion beam and cleaning device, which is applied in the directions of cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as inability to effectively clean focused ion beam samples, and achieve the effect of improving cleaning effect and improving picture quality.
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[0048] The specific implementation of the focused ion beam sample cleaning method and device provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0049] At present, when low-voltage ion beams are used to clean impurities such as redeposits and amorphous layers on the surface of the focused ion beam, the angle caused by the sticky sample during the focused ion beam sample preparation process, such as the prepared focused ion beam sample and the grid The relationship between the grid fingers is not parallel or perpendicular to each other, so that part of the surface of the focused ion beam sample cannot be in contact with the ion beam during the cleaning process, so that it cannot be cleaned, which reduces the cleaning effect of the focused ion beam sample.
[0050] In order to improve the cleaning effect of focused ion beam samples, this specific embodiment provides a focused ion beam sample cleaning method, with f...
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Abstract
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