Six-mass-block MEMS (Micro Electro Mechanical System) double-shaft gyroscope for inhibiting common-mode interference signal

Abstract

The invention discloses a six-mass-block MEMS (Micro Electro Mechanical System) double-shaft gyroscope for inhibiting a common-mode interference signal. The MEMS double-axis gyroscope can simultaneously detect angular velocities in the X-axis direction and the Y-axis direction. The gyroscope structurally comprises two triangular mass blocks, two X-axis mass blocks, two Y-axis mass blocks, mass block connecting beams, comb tooth structures, anchor point structures, supporting beam structures and frame structures. The working principle of the gyroscope is as follows: the two triangular mass blocks of the gyroscope are driven by electrostatic force to perform reverse simple harmonic vibration along the out-of-plane (namely, Z-axis), and the simple harmonic vibration is transmitted to the mass blocks in the X-axis direction and the Y-axis direction through the mass block connecting beams. When angular velocity exists along the X axis or the Y axis, due to the Coriolis effect, a pair of mass blocks on the X axis or the Y axis are caused to perform reverse vibration, and a differential mode capacitance signal is generated. And when the rear-end processing circuit adopts a differential circuit, a differential-mode capacitance signal is amplified, and a common-mode interference signal is suppressed, so that the anti-interference capability of the gyroscope is improved.

Description

technical field [0001] The invention belongs to the technical field of micro / nano electromechanical systems, and in particular relates to a six-mass block MEMS biaxial gyroscope capable of suppressing common-mode interference signals. Background technique [0002] The MEMS gyroscope is a sensor that perceives the external angular velocity through the Coriolis effect. Compared with the traditional gyroscope, it has smaller size, higher reliability, larger measurement range and longer life. It is the current inertial navigation field. It is a popular research object and is widely used in vehicle control, precise positioning, consumer electronics, aerospace and weapon guidance and other fields. [0003] According to the survey of existing MEMS gyroscopes, it is found that most of the common MEMS gyroscopes currently detect the gyro structure of a single axis. In order to realize the dual-axis detection of angular velocity, it is often realized by integrating two separate gyrosc...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a six-mass block capable of suppressing the common-mode interference signal of the gyroscope in view of the fact that the existing MEMS resonant vibrating gyroscope with dual-axis detection cannot structurally solve the common-mode signal problem caused by external interference MEMS dual axis gyroscope

Images