Application of annular light spot laser in cleaning concave-convex groove structure
A ring-shaped spot and laser technology, applied in the field of lasers, can solve problems such as unclean cleaning, uneven substrate, and substrate damage
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Embodiment 1
[0049] The optical power of the pulsed laser is 240W. The optical power of the continuous laser is 960W. The pulse frequency of the pulsed laser is 20 kHz. The pulse width of the pulsed laser is 80 nanoseconds. The scan rate of the laser beam is 5000 mm / s. The spot overlap rate of the laser beam is 40%. Before the laser beam is collimated and focused: the diameter of the spot of the laser beam is 300 microns; the diameter of the first spot formed by the pulsed laser is 100 microns; the inner diameter of the second spot formed by the continuous laser is 130 microns, and the outer diameter is 300 microns ; After the laser beam is collimated and focused: the pulsed laser beam and the continuous laser beam are combined to form a combined beam spot, and the diameter of the combined beam spot is 132 microns. The laser beam is collimated by the collimating mirror and focused by the focusing mirror; the focal length of the collimating mirror is 75mm; the focal length of the focusi...
Embodiment 2
[0053] The optical power of the pulsed laser is 300W. The optical power of the continuous laser is 1280W. The pulse frequency of the pulsed laser is 30 kHz. The pulse width of the pulsed laser is 200 nanoseconds. The scan rate of the laser beam is 8000 mm / s. The spot overlap rate of the laser beam is 60%. Before the laser beam is collimated and focused: the diameter of the spot of the laser beam is 400 microns; the diameter of the first spot formed by the pulsed laser is 150 microns; the inner diameter of the second spot formed by the continuous laser is 200 microns, and the outer diameter is 400 microns ; After the laser beam is collimated and focused: the pulsed laser beam and the continuous laser beam are combined to form a combined beam spot, and the diameter of the combined beam spot is 125 microns. The laser beam is collimated by the collimating mirror and focused by the focusing mirror; the focal length of the collimating mirror is 50mm; the focal length of the focu...
Embodiment 3
[0057] The optical power of the pulsed laser is 243W. The optical power of the continuous laser is 1008W. The pulse frequency of the pulsed laser is 22.5 kHz. The pulse width of the pulsed laser is 100 nanoseconds. The scan rate of the laser beam is 5850 mm / s. The spot overlap rate of the laser beam is 45%. Before the laser beam is collimated and focused: the diameter of the spot of the laser beam is 300 microns; the diameter of the first spot formed by the pulsed laser is 100 microns; the inner diameter of the second spot formed by the continuous laser is 130 microns, and the outer diameter is 300 microns ; After the laser beam is collimated and focused: the pulsed laser beam and the continuous laser beam are combined to form a combined beam spot, and the diameter of the combined beam spot is 106 microns. The laser beam is collimated by the collimating mirror and focused by the focusing mirror; the focal length of the collimating mirror is 90mm; the focal length of the fo...
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