Computer-aided adjustment device and method for aspheric computer-generated holography detection
A computer-aided and computational holographic technology, applied in the field of optical inspection, achieves good versatility, reduces adjustment difficulty, and avoids human errors
Active Publication Date: 2022-03-29
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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[0004] In order to solve the problem of optical element adjustment in the optical path of computational holographic detection, the present invention proposes a computer-aided adjustment device and method for aspheric computational holographic detection
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[0064] In order to further illustrate the features of the present invention, the following will be described in detail in conjunction with specific implementation examples and accompanying drawings.
[0065] figure 1 Shown is the computer-aided adjustment device for aspheric surface calculation holographic detection in the present invention, including: marble base 1, phase shift interferometer 2, calculation holography image 3 , holographic adjustment frame 301, axial displacement table 4, tilt adjustment table 401, lifting device 5, aspheric mirror to be tested 6, detection tooling 7, first standard mirror 701, second standard mirror 702, tooling assembly 703, the first An autocollimator 8, a computer system 9 and a second autocollimator 10; wherein, the phase-shifting interferometer 2 is installed vertically on the marble base 1 to avoid errors caused by environmental factors such as vibration; image 3 The holographic adjustment frame 4 is connected with the lifting devic...
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The invention discloses a computer-aided adjustment device and method for aspheric computer-generated holography detection. A phase shift interferometer is mounted on a marble cross beam; the computer-generated hologram is fixed to the phase shift interferometer through a holographic adjusting frame, and the computer-generated hologram is adjusted through the holographic adjusting frame; a measurement platform composed of a detection tool, an axial displacement table and an inclination adjustment table is installed on a lifting device connected with a marble base, and the spatial attitude of an aspheric element to be measured in the measurement process is monitored in real time through two vertically-installed autocollimator angle measurement systems; the computer system is connected with the phase shift interferometer and collects the surface shape information of the aspheric surface to be measured; the adjustment amount required by the aspheric surface to be detected is obtained by analyzing the collected surface shape information, and the position adjustment table is controlled to quantitatively adjust the aspheric surface according to the detection data of the autocollimator, so that the accurate adjustment of a detection light path is realized. The method provides an effective adjustment means for aspheric computer-generated holography detection, and has a great application value.
Description
technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a computer-aided adjustment device and method for aspheric calculation holographic detection. Background technique [0002] Aspheric optical elements refer to optical elements whose surface shape deviates from the spherical surface to a certain extent. It has a design freedom far beyond that of traditional spherical optical elements. It can effectively correct various aberrations, improve imaging quality, and reduce the size of optical elements in the optical system. quantity. Especially with the continuous development and improvement of modern optical technology, aspheric optical elements are widely used in many key optical systems. At present, the main factor that mainly limits the development of aspheric optical components is the surface shape detection technology with matching precision. [0003] Computational holography is one of the effective methods for surfa...
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CPCG01B11/2441
Inventor 张帅侯溪严伟胡小川陈强
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI