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Array device testing device and testing method

A test device and device technology, applied in the field of microelectronics, can solve problems such as inability to meet unit device address selection and decoding, inability to meet array-level device test requirements, single function, etc., and achieve the effect of expanding test and measurement capabilities

Pending Publication Date: 2022-04-01
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the existing semiconductor parameter analyzer (Keysight B1500A) is mainly for parameter measurement of unit devices, and its functions are relatively single, which cannot meet the testing requirements of array-level devices.
The details are as follows: First, the existing semiconductor parameter analyzer (Keysight B1500A) has limited test channels and cannot provide an off-the-shelf solution for array device testing
Secondly, address selection and decoding of unit devices in array devices cannot be satisfied.
Thirdly, for the switching operation of DC signal and pulse signal, external equipment is required to carry out, and the single cycle is longer

Method used

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Embodiment Construction

[0021] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present disclosure, but not all of them. Based on the embodiments in the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present disclosure.

[0022] The terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting of the present disclosure. The terms "comprising", "comprising", etc. used herein indicate the presence of stated features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components....

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Abstract

The invention provides an array device testing device, and the device comprises a loading plate which is used for loading a to-be-tested array device; the main control circuit board is electrically connected with the loading plate and is used for selecting a unit device with a specific address in the array device and controlling switching between a direct current signal and a pulse signal applied to the unit device; the semiconductor parameter analyzer is used for outputting the direct current signal or the pulse signal to test the unit device of the specific address; and the control host is used for controlling the main control circuit board and the semiconductor parameter analyzer and carrying out statistical analysis on a test result of the semiconductor parameter analyzer. On the other hand, the invention also provides a test method of the array device.

Description

technical field [0001] The disclosure relates to the technical field of microelectronics, can be applied to the field of semiconductor testing equipment and testing methods, and in particular relates to an array device testing device and testing method. Background technique [0002] With the development of technologies such as big data, artificial intelligence and cloud computing, the rapid growth of new information devices has made it necessary to test the units and arrays of new information devices. In conventional device testing, the basic current-voltage (IV) and capacitance-voltage (CV) characteristic tests of unit devices can be completed by the existing semiconductor parameter analyzer (Keysight B1500A). [0003] However, the existing semiconductor parameter analyzer (Keysight B1500A) is mainly oriented to the parameter measurement of unit devices, and its functions are relatively single, which cannot meet the testing requirements of array-level devices. The details ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
Inventor 姚志宏余兆安董大年吴飞宏梁圣法卢年端
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI