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Supercritical carbon dioxide foaming preparation device and foaming preparation method for low-dielectric-constant polyimide microporous film

A low dielectric constant, microporous film technology, which is applied in the field of low dielectric constant polyimide microporous film preparation equipment and preparation, can solve the problems of rare polyimide microporous film equipment, and achieve rapid Efficient preparation, less operation process and compact equipment

Pending Publication Date: 2022-04-05
QINGDAO UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Equipment with low dielectric constant polyimide microporous film is still rare

Method used

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  • Supercritical carbon dioxide foaming preparation device and foaming preparation method for low-dielectric-constant polyimide microporous film
  • Supercritical carbon dioxide foaming preparation device and foaming preparation method for low-dielectric-constant polyimide microporous film
  • Supercritical carbon dioxide foaming preparation device and foaming preparation method for low-dielectric-constant polyimide microporous film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment example 1

[0030] Connect each device in turn, turn on the metering pump I (2) and metering pump II (4) to mix the N, N-dimethylacetamide solvent and the polyamide in the N,N-dimethylacetamide solvent tank (1) The polyamic acid solution in the acid solution tank (3) is injected into the batching tank (5) to be configured as a 25% mass fraction polyamic acid solution.

[0031] Close the metering pump I (2) and the metering pump II (4), open the metering pump III (6), and pass the polyamic acid solution configured in the batching kettle (5) through the connecting hose (12-14) and the spray gun (12 -10) Evenly spray to the spray plate (12-8).

[0032] Open the vacuum pump (10) and high-pressure valve II (11), vacuumize the autoclave (12), then close the vacuum pump (10) and high-pressure valve II (11), and heat the oil through the heat transfer oil inlet (12-5-3 ) into the heat conduction oil chamber (12-5-2) of the jacket (12-5), heat the sprayed plate to 80°C and maintain it for 2 hours,...

Embodiment example 2

[0037] Connect each device in turn, turn on the metering pump I (2) and metering pump II (4) to mix the N, N-dimethylacetamide solvent and the polyamide in the N,N-dimethylacetamide solvent tank (1) The polyamic acid solution in the acid solution tank (3) is injected into the batching tank (5) to be configured as a 25% mass fraction polyamic acid solution.

[0038] Close the metering pump I (2) and the metering pump II (4), open the metering pump III (6), and pass the polyamic acid solution configured in the batching kettle (5) through the connecting hose (12-14) and the spray gun (12 -10) Evenly spray to the spray plate (12-8).

[0039] Open the vacuum pump (10) and high-pressure valve II (11), vacuumize the autoclave (12), then close the vacuum pump (10) and high-pressure valve II (11), and heat the oil through the heat transfer oil inlet (12-5-3 ) into the heat conduction oil chamber (12-5-2) of the jacket (12-5), heat the sprayed plate to 80°C and maintain it for 2 hours,...

Embodiment example 3

[0044] Connect each device in turn, turn on the metering pump I (2) and metering pump II (4) to mix the N, N-dimethylacetamide solvent and the polyamide in the N,N-dimethylacetamide solvent tank (1) The polyamic acid solution in the acid solution tank (3) is injected into the batching tank (5) to be configured as a 25% mass fraction polyamic acid solution.

[0045] Close the metering pump I (2) and the metering pump II (4), open the metering pump III (6), and pass the polyamic acid solution configured in the batching kettle (5) through the connecting hose (12-14) and the spray gun (12 -10) Evenly spray to the spray plate (12-8).

[0046] Open the vacuum pump (10) and high-pressure valve II (11), vacuumize the autoclave (12), then close the vacuum pump (10) and high-pressure valve II (11), and heat the oil through the heat transfer oil inlet (12-5-3 ) into the heat conduction oil chamber (12-5-2) of the jacket (12-5), heat the sprayed plate to 80°C and maintain it for 2 hours,...

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Abstract

The invention discloses a supercritical carbon dioxide foaming preparation device and a foaming preparation method for a low-dielectric-constant polyimide microporous film. The system comprises an N, N-dimethylacetamide solvent material tank, a metering pump I, a polyamide acid solution tank, a metering pump II, a batching kettle, a metering pump III, a carbon dioxide storage tank, a compressor, a high-pressure valve I, a vacuum pump, a high-pressure valve II, a high-pressure kettle, an end socket moving device and a foaming kettle. The foaming preparation method comprises the following steps: preparing a solution in a batching kettle, spraying the solution into a high-pressure kettle, and completing the processes of vacuum solvent removal, gradient heating and supercritical carbon dioxide treatment by controlling a vacuum pump, a compressor, a high-pressure valve and a heating jacket; and transferring the polyimide film into a foaming kettle, and heating and foaming in a silicone oil bath to prepare the final polyimide microporous film. The method has the advantages that the automation degree is high, operation is simple, the low-dielectric-constant polyimide microporous film can be rapidly and efficiently prepared, and industrial production of the low-dielectric-constant polyimide microporous film is easy to achieve.

Description

technical field [0001] The invention relates to a low dielectric constant polyimide microporous film preparation device and a preparation method, in particular to a low dielectric constant polyimide microporous film supercritical carbon dioxide foaming preparation device and a foaming preparation method. Background technique [0002] With the development of the microelectronics industry, the functions of microelectronic components have been continuously enhanced and their volumes have been continuously reduced. In order to increase the transmission speed of the signal and reduce the signal interference, it is necessary to use an interlayer insulating material with a low dielectric constant. The dielectric constant of a new generation of insulating materials [0003] Supercritical carbon dioxide refers to CO with a temperature higher than 31.1°C and a pressure higher than 7.38MPa. 2 , it has a solubility similar to that of a liquid and a diffusion coefficient similar to tha...

Claims

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Application Information

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IPC IPC(8): B29C44/02B29C44/34C08J9/12C08L79/08
Inventor 胡德栋段淑娜韩俊杰王云飞李旭航
Owner QINGDAO UNIV OF SCI & TECH
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