SEM sample platform and SEM
A sample platform, scanning electron microscope technology, applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problem that the sample holder cannot be used, and achieve the effect of improving the detection efficiency
Active Publication Date: 2022-05-13
CHINAINSTRU & QUANTUMTECH (HEFEI) CO LTD
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Problems solved by technology
However, in the related art, the sample is fixed in one position and then the electron beam is used to hit the sample, and then the electrical signal on the sample holder is collected, but this structure cannot be applied to the movable sample holder.
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[0035] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0036] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present ...
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The invention discloses a sample platform of a scanning electron microscope and a scanning electron microscope. The sample platform includes: a base; a sample carrying platform, the sample carrying platform is used to place a plurality of samples along the circumferential direction; a rotating drive component is arranged on the base and has a rotatable driving end; a current guiding assembly, the current guiding assembly includes an insulating base, a first conductive part and a second conductive part, the insulating base is arranged on the driving end and connected to the sample carrier, so that the sample carrier rotates, The first conductive member is connected to the sample carrier, the first conductive member is ring-shaped around the rotation axis of the sample carrier, and the second conductive member electrically contacts the first conductive member to output the electrical signal of the sample. In the present invention, the rotation of the sample carrier is driven by the rotation drive assembly, and the sample carrier can carry multiple samples. At the same time, the second conductive member is always in contact with the ring-shaped first conductive member, so as to collect electrical signals while the sample carrier is rotating, and improve detection efficiency.
Description
technical field [0001] The invention relates to the technical field of parts and components of a scanning electron microscope, in particular to a sample platform of a scanning electron microscope and a scanning electron microscope. Background technique [0002] The sampling action of the scanning electron microscope is that the electron beam hits the sample fixed on the surface of the sample holder, and the reflected electrons on the sample are collected and analyzed by detectors such as secondary electrons or energy spectrum. After a part of the incident electrons interact with the sample, The energy is completely lost and cannot escape from the surface of the sample, so it is absorbed by the sample, which is called absorbed electrons. The electrical signal of the absorbed electrons can be adjusted into an image, so it is critical to measure the absorbed electrons on the sample. However, in the related art, the sample is fixed in one position and then the electron beam is ...
Claims
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IPC IPC(8): H01J37/20H01J37/28
Inventor 吴天成潘结春张俊
Owner CHINAINSTRU & QUANTUMTECH (HEFEI) CO LTD