Lower electrode structure capable of effectively preventing Arcling and installation method thereof

An electrode structure and electrode technology, applied in the direction of instruments, nonlinear optics, optics, etc., can solve the problems of uncertainty, inability to produce insulation effect, easy damage of anodic oxidation coating, etc., and achieve the effect of cost saving and design

Active Publication Date: 2022-04-12
CHONGQING GENORI IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] During the long-term use of the lower electrode of the existing ESC, the anodized coating on the surface of the taper hole at the upper end of the helium hole is easily damaged due to the long-term scouring of the helium gas, and the insulating effect cannot be produced, resulting in the helium hole groove. Arcing is prone to occur after the upper end contacts the plasma in the etching chamber, and the randomness and uncertainty of the arcing point will cause serious damage to the client's products

Method used

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  • Lower electrode structure capable of effectively preventing Arcling and installation method thereof
  • Lower electrode structure capable of effectively preventing Arcling and installation method thereof
  • Lower electrode structure capable of effectively preventing Arcling and installation method thereof

Examples

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Effect test

Embodiment 1

[0026] Example 1, such as Figure 1~2 As shown, the present invention is a lower electrode structure that can effectively prevent Arcing, including an electrode main board 1, a helium hole 2 opened on the electrode main board 1, the electrode main board 1 is rectangular, and its inner side is distributed with two large and small circles arranged in a rectangular shape The helium hole 2, wherein the structure of the helium hole 2 has been improved. Specifically, an insulating block 3 is inlaid on the electrode main board 1 at one end of the helium hole 2, and a through hole 4 with a diameter smaller than the helium hole 2 is provided on the insulating block 3, and the through hole 4 Coaxially arranged at the outer end of the helium hole 2, and the through hole 4 communicates with the helium hole 2 and runs through both sides of the electrode main board 1, so that helium can pass through the helium hole 2 and pass through the through hole 4 Spray out to meet the needs of the pr...

Embodiment 2

[0029] Example 2, such as image 3 As shown, the difference between this embodiment and Embodiment 1 is that the structure of the guide groove 5 is arc-shaped.

Embodiment 3

[0030] Example 3, such as Figure 4 and 5 As shown, the difference between this embodiment and Embodiment 2 is that a sealing ring 6 is provided between the insulating block 3 and the electrode main board 1, and a first hole for accommodating the sealing ring 6 is provided on the end surface of the insulating block 3. Annular groove 7, the second annular groove 8 for accommodating the sealing ring 6 is opened on the electrode main board 1, by setting the sealing ring 6, air leakage can be prevented, and the injection pressure of helium can be controlled relatively uniformly.

[0031] In this embodiment, the outer side of the insulating block 3 is provided with an auxiliary mounting block 9, and the insulating block 3 is preferably made of ceramic material, which has a good insulating function and a smooth surface, which can better guide helium, so that The helium inflow guide is more regular, so that all the flushing force is all on the ceramic material. In the case of long-t...

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Abstract

The invention discloses a lower electrode structure capable of effectively preventing Arcling and an installation method thereof, and belongs to the technical field of liquid crystal panel parts, the structure comprises an electrode mainboard, a helium hole formed in the electrode mainboard, an insulation block located at one end of the helium hole and embedded in the electrode mainboard, and an upper electrode arranged at the other end of the helium hole, a through hole with the aperture smaller than that of the helium hole is formed in the insulating block, the through hole is coaxially formed in the outer end of the helium hole, and the through hole penetrates through the two sides of the electrode main board after being communicated with the helium hole. According to the device and the method disclosed by the invention, the structural quality of the anodic oxidation coating in the helium hole can be effectively improved by additionally arranging the local mounting insulating block, so that the anode electrifying phenomenon is avoided in a long-time use state, and the generation of helium hole Arcing is prevented.

Description

technical field [0001] The invention belongs to the technical field of liquid crystal panel components, and in particular relates to a lower electrode structure capable of effectively preventing arcing and an installation method thereof. Background technique [0002] During the long-term use of the lower electrode of the existing ESC, the anodized coating on the surface of the taper hole at the upper end of the helium hole is easily damaged due to the long-term scouring of the helium gas, and the insulating effect cannot be produced, resulting in the helium hole groove. Arcing is likely to occur after the upper end contacts the plasma in the etching chamber, and the randomness and uncertainty of the arcing point will cause serious damage to the client's products. Contents of the invention [0003] In view of this, the object of the present invention is to provide a lower electrode structure that can effectively prevent Arcing and its installation method. Without changing t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1343
CPCG02F1/1343
Inventor 吴昊李宗泰杨佐东
Owner CHONGQING GENORI IND CO LTD
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