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E-type radio frequency power supply output circuit

A radio frequency power supply and output circuit technology, applied in electrical components, amplifiers with semiconductor devices/discharge tubes, and improving amplifiers to expand bandwidth, etc. The effect of flatness

Pending Publication Date: 2022-04-12
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of this application is to provide a Class E RF power output circuit that can overcome the problems of narrow bandwidth and poor power flatness within the required bandwidth of traditional Class E amplifier circuits

Method used

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  • E-type radio frequency power supply output circuit
  • E-type radio frequency power supply output circuit
  • E-type radio frequency power supply output circuit

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Embodiment Construction

[0030] The present application will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present application are shown in the drawings, it should be understood that the present application may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the scope of this application to those skilled in the art.

[0031] It should be noted that the terms "first", "second" and the like in this application are only used to distinguish different devices unless there is an explicit description to the contrary.

[0032] Please refer to figure 2 . figure 2 A schematic diagram showing an output circuit of a class E radio frequency power supply according to an embodiment of the present application. As shown in the figure, the class E RF power supply output circuit includes...

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Abstract

The invention relates to an E-type radio frequency power supply output circuit. According to the technical scheme, different inductors are conducted through the switch to adjust the resonant frequency of the series resonant circuit formed by the inductors and the first capacitor C1, so that resonant point conversion is conveniently realized, the bandwidth of the E-type radio frequency power supply is widened, the voltage and current of the radio frequency power supply are kept in a stable linear relation within the required bandwidth, and the power supply efficiency is improved. And the power flatness in the required bandwidth is improved.

Description

technical field [0001] This application relates to the field of radio frequency power supply technology, in particular to an E-class radio frequency power supply output circuit. Background technique [0002] RF power supply is the core component of semiconductor process equipment, widely used in various process equipment, such as chip preparation, TFT, LED, photovoltaic industry, medical treatment, beauty treatment, plasma spectrum analysis, disinfection, cleaning and so on. [0003] At present, the commonly used RF power supply is a solid-state RF power supply, which uses field effect transistors as power amplification components. The general power amplification modes are: Class A, Class B, Class AB, Class D, and Class E. The first three are relatively inefficient and their use is limited. The latter two are used more and more, and the Class D power amplification generally requires two FETs to be used at the same time. It is difficult to achieve zero current at the maximum...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03F1/42H03F3/217H03F3/193
Inventor 李冠军刘学文李光健
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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