Blade height measuring device and dicing machine

Abstract

The invention discloses a blade height measuring device and a dicing machine. The sensor includes a transmitting end prism and a receiving end prism installed on the mount at relative intervals, and the transmitting end prism emits light to the receiving end prism; a cleaning structure, the cleaning structure is arranged on the base, and the cleaning structure includes at least two water blowing pipes and at least two blowing pipes. The air pipe and the water inlet of the water blowing pipe are all connected with the water inlet channel. The water blowing port of a part of the water blowing pipe is set toward the prism at the transmitting end, and the water blowing port of the other part of the water blowing pipe is set toward the prism at the receiving end; the air inlet of the blowing pipe is connected with the air inlet channel. In communication, the blowing port of a part of the blowing tube is set towards the prism at the transmitting end, and the blowing port of the other part of the blowing tube is set towards the prism at the receiving end.

Description

technical field [0001] The present application relates to the technical field of dicing machine cutting, and in particular, to a blade height measuring device and a dicing machine. Background technique [0002] In the field of semiconductor processing, especially in the field of wafer processing, the accuracy of the cutting depth of the workpiece is very high, but because the cutting blade will be worn along with the cutting process, the outer diameter of the cutting blade will become smaller, which will affect the workpiece. cutting depth. In order to measure the wear value of the cutting blade during the cutting process, so as to accurately control the cutting depth of the workpiece and ensure the machining accuracy of the workpiece, an altimetry system is provided to measure the blade wear value. The altimetry system mainly includes the light transmitting end and the receiving end. The whole height measuring system is fixed, and the spindle slowly descends with the cutti...

AI Technical Summary

Problems solved by technology

[0003] However, the cleaning structure in the current altimetry system does not work well for prism cleaning.

Since the cutting cavity is filled with water mist and cutting dirt, the prism will be seriously polluted, and the cleaning effect of the cleaning structure is not good or unstable, which will greatly affect the measurement accuracy of the height measurement system, thereby affecting the workpiece depth of cut

The cleaning structure in the current altimetry system will have the problem that the blown clean water will gather around the prism, causing interference to the optical path, thus affecting the accuracy of the measurement results of the altimetry system

And the water blown out of the cleaning structure is due to the residual pressure. After the control valve is closed, the water flow of the entire waterway will still slowly overflow from the blowing nozzle. , the overflowing water droplets will be blown to the prism together, affecting the light transmittance and thus affecting the measurement accuracy

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