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Sliding type quartz feeding device, Czochralski single crystal furnace and method for increasing pulling speed

A feeding device and sliding technology, which is applied in the field of sliding quartz feeding devices, can solve the problems of cost reduction, poor interchangeability and disadvantages of a single feeder, and achieve the effect of cost reduction

Pending Publication Date: 2022-04-19
宁夏申和新材料科技有限公司
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] The single feeder in the prior art is poorly interchangeable, and different specifications of single crystal furnaces need to be equipped with feeders of different specifications, which is not conducive to reducing costs

Method used

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  • Sliding type quartz feeding device, Czochralski single crystal furnace and method for increasing pulling speed
  • Sliding type quartz feeding device, Czochralski single crystal furnace and method for increasing pulling speed
  • Sliding type quartz feeding device, Czochralski single crystal furnace and method for increasing pulling speed

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Embodiment Construction

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the embodiments. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. Ordinary technicians can also obtain other drawings based on these drawings on the premise of not paying creative work.

[0025] see Figure 1 to Figure 4 , the embodiment of the present invention provides a sliding quartz feeding device 10, including a feeder 11, a height adjustment mechanism 12, the feeder 11 includes a feeding cylinder 111, a connecting flange 112, and the connecting flange 112 is fixed on the bottom of the feeding cylinder 111 At the upper end, the height adjustment mechanism 12 includes a fixed flange 121, an adjustment rod 122, and a height adjustment ring 123. The fixed flange 121 is set on the outer wall of the feeder 11, and the...

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Abstract

A sliding type quartz feeding device comprises a feeder and a height adjusting mechanism, the feeder comprises a feeding cylinder and a connecting flange, the connecting flange is fixedly arranged at the upper end of the feeding cylinder, the height adjusting mechanism comprises a fixing flange, an adjusting rod and a height adjusting ring, the fixing flange is arranged on the outer wall of the feeder in a sleeving mode, and the height adjusting ring is arranged on the outer wall of the feeding cylinder. The lower ends of the adjusting rods are connected with the fixed flange, adjusting holes are formed in the connecting flange, the upper ends of the adjusting rods penetrate through the adjusting holes, adjusting nuts are screwed into the upper ends of the adjusting rods, a plurality of height adjusting rings are sleeved on each adjusting rod, and according to different sizes and specifications of the single crystal furnaces, the height adjusting rods can be adjusted according to different sizes and specifications of the single crystal furnaces. The operation height of the feeder is adjusted by increasing or reducing the number of the height adjusting rings, the feeder is suitable for various furnace types, the cost is reduced, and the invention further provides a Czochralski crystal growing furnace and a method for improving the crystal pulling rate.

Description

technical field [0001] The invention relates to the technical field of Czochralski single crystal silicon production, in particular to a sliding quartz feeding device, a Czochralski single crystal furnace and a method for increasing the pulling speed. Background technique [0002] In the process of growing a single crystal by the Czochralski method, firstly, a feeder is used to add silicon material into a quartz crucible, and the silicon material is heated to melt into a melt, and then a single crystal is formed at a certain pulling speed. [0003] The single feeder in the prior art has poor interchangeability, and it is necessary to configure feeders of different specifications for single crystal furnaces of different specifications, which is not conducive to reducing costs. Contents of the invention [0004] In view of this, it is necessary to propose a sliding quartz feeding device for the above-mentioned deficiencies. [0005] It is also necessary to propose a Czochra...

Claims

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Application Information

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IPC IPC(8): C30B15/02C30B15/14C30B15/20C30B29/06
CPCC30B15/02C30B15/14C30B15/20C30B29/06Y02P70/50
Inventor 王彦娟丁亚国梁万亮马国忠顾燕滨
Owner 宁夏申和新材料科技有限公司
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