Water-cooling melting chamber of closed melting machine

Abstract

The invention provides a closed melting machine water-cooling melting chamber which comprises a melting chamber body, the melting chamber body comprises peripheral side plates, a top plate, two front doors, a left side door, a right side door, a bottom support and a bottom plate cover plate, the top plate and the peripheral side plates are plate bodies formed by splicing a plurality of water-cooling plates, and water inlets, water outlets and water channel structures are arranged in the water-cooling plates. The water cooling plates comprise a first water cooling plate, a second water cooling plate and a third water cooling plate; a kidney-shaped hole is formed in the upper layer of the first water-cooling plate, a window is formed in the upper layer of the second water-cooling plate, the top plate is a plate body formed by splicing the first water-cooling plate, the second water-cooling plate and the third water-cooling plate through bolts, and the peripheral side plates are plate bodies formed by splicing the second water-cooling plate and the third water-cooling plate through bolts; the two front doors comprise the left front door and the right front door, the two front doors are located on the front side plates of the peripheral side plates, the left front door and the right front door are connected with the water cooling plate through pin shafts respectively, two oppositely-arranged air cylinder supports are arranged on the bottom support, and air cylinders are fixed to the air cylinder supports through supporting bases.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a melting chamber of a closed melting machine. Background technique [0002] In the past, the melting machine was an open design, and the dust in the air would pollute the crucible, and the open design melting machine, in the process of starting the arc, the noise could not be controlled, and a large amount of heat was generated, causing damage to the surrounding equipment. damage. Contents of the invention [0003] Aiming at the problems existing in the prior art, the present invention provides a melting chamber of a closed melting machine to solve at least one of the above technical problems. [0004] The technical solution of the present invention is: a melting chamber of a closed melting machine, including a main body of the melting chamber, characterized in that the main body of the melting chamber includes side plates around, a top plate, two front doors, two left ...

AI Technical Summary

Problems solved by technology

[0002] In the past, the melting machine was an open design, and the dust in the air would pollute the crucible, and the open design melting machine, in the process of starting the arc, the noise could not be controlled, and a large amount of heat was generated, causing damage to the surrounding equipment. damage

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