Three-dimensional plasma jet automatic control system

An automatic control system and plasma technology, applied in the direction of plasma, electrical components, etc., can solve the problems of cumbersome control operations at the three-dimensional level and difficulty in ensuring the uniformity of processing intensity, and achieve large-area uniform processing and convenient three-dimensional movement control , to solve the effect of electromagnetic interference

Pending Publication Date: 2022-04-29
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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Problems solved by technology

[0005] The main purpose of the present invention is to overcome the deficiencies of the aforementioned technologies, and propose a three-dimensional plasma jet automatic control system to solve the cumbersome three-dimensional layer control operation and difficulty in ensuring the uniformity of treatment intensity in the existing three-dimensional plasma jet control scheme technical issues

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  • Three-dimensional plasma jet automatic control system

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] In view of the problems of complex three-dimensional level control and uneven processing of large areas in the prior art when plasma jets process three-dimensional samples, and in practical applications of plasma jets, in addition to controlling its processing position, it is also necessary to control its electrical parameters, Therefore, it is necessary to design a control system to integrate the two systems, and to ensure that the operation of each part is relatively independent, to enhance the operability of the user, and to improve the efficiency of the experiment. And it needs to be equipped with corresponding control strategies and plasma jet parameters according to the corresponding three-dimensional mobile devices. In view of this, the embodiment of the present invention proposes a three-dimensional plasma jet automatic control s...

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Abstract

The invention discloses a three-dimensional plasma jet automatic control system, and the system comprises an upper computer which is used for a user to carry out parameter setting and issue parameter information; the main controller is connected to the upper computer and is used for receiving the parameter information from the upper computer and generating a control signal according to the parameter information; the three-axis guide rail control system and the high-voltage power supply state controller are connected to the main controller, and the three-axis guide rail control system is provided with a three-axis guide rail module formed by combining and building a plurality of guide rail units and a jet pipe capable of fixing a processed sample or a plasma jet device; the three-axis guide rail control system is configured to control the three-axis guide rail module to drive the treated sample or the jet pipe to move according to preset parameters under the control of a control signal so as to perform sample treatment with controllable treatment distance and / or treatment area; the high-voltage power supply state controller is configured to be capable of being connected with a power supply parameter control end of the plasma jet device so as to control power supply parameters of the plasma jet device according to parameter information received from the upper computer.

Description

technical field [0001] The invention relates to the field of plasma applications, in particular to the automatic control technology of plasma jets, in particular to a three-dimensional plasma jet automatic control system for realizing automatic control of plasma jets in multiple application fields such as plasma surface treatment and biomedicine. Background technique [0002] Plasma is a special substance composed of a large number of charged particles and neutral particles produced by ionization of gas, generally known as the fourth state of matter. The plasma contains a large number of active substances, which will have physical and chemical reactions with the substances in contact with the plasma, resulting in different treatment effects. [0003] Traditional plasma jet technology has high requirements for the environment of plasma generation, so atmospheric pressure low-temperature plasma has attracted more and more attention from scholars. Atmospheric pressure low-temp...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/00
CPCH05H1/00
Inventor 张若兵赵子新郭新正王竞泽
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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