Consistency testing method for diffusion flow meter

An inspection method and flowmeter technology, which is applied in the direction of testing/calibrating volume flow, etc., can solve the problems of waste of raw materials, failure to find flowmeter problems in time, etc., and achieve the effect of rapid and accurate judgment

Pending Publication Date: 2022-07-15
WUXI SUNTECH POWER CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] However, in the related art, each process of testing the flowmeter needs to be outsourced, and if there is a problem with the flo

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  • Consistency testing method for diffusion flow meter
  • Consistency testing method for diffusion flow meter
  • Consistency testing method for diffusion flow meter

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Embodiment Construction

[0042] In order to make the objectives, technical solutions and advantages of the present application clearer, the embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0043] First, briefly introduce the terms involved in the embodiments of this application:

[0044] Diffusion flow meters, as well as thermal gas mass flow meters, are flow meters based on thermal diffusion technology. In the embodiment of the present application, the diffusion flowmeter is used to measure the gas mass flow and to control the gas delivery into the pipeline. In the present application, a diffusion flowmeter is used for gas delivery into the furnace tube, implemented as a diffusion flowmeter in a diffusion furnace dedicated to the manufacture of solar p-n junctions. Taking the thermal diffusion process of n-type semiconductor surface doping with trivalent boron as an example, the liquid BCL3 or BBr3 is used as a diffusion ...

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Abstract

The invention relates to a diffusion flow meter consistency testing method, and relates to the field of solar cell manufacturing. The method comprises the following steps: controlling air pressure in an experimental loop to a first air pressure; the diffusion flow meter is used, the display flow of the diffusion flow meter is determined, and the preset type corresponds to the type of the diffusion flow meter; determining test time; determining the consistency of the display flow of the diffusion flow meter and the output flow of the diffusion flow meter based on the test time, wherein the output flow of the diffusion flow meter indicates the diffusion flow meter to control the flow of the preset type of gas injected into the gas inlet pipe. The air inlet pipe controlled by the flow meter serves as a unique outlet of a closed air path and is a unique reason for air pressure change in an experimental loop, the actual flow of the diffusion flow meter can be directly determined according to the test time, and then whether the display flow of the diffusion flow meter is consistent with the output flow of the diffusion flow meter or not is obtained. Whether the diffusion flow meter has problems can be judged without dismounting the flow meter in environments such as a solar cell plant.

Description

technical field [0001] The application relates to the field of solar cell manufacturing, and in particular, to a method for checking the consistency of a diffusion flowmeter. Background technique [0002] A solar cell is a device that directly converts solar energy into electrical energy. It mainly uses the photovoltaic effect of p-n junction to convert solar energy into electrical energy. In the production process of solar cells, thermal diffusion method is generally used to make p-n junction, and the diffusion furnace is the manufacturing process. Special equipment for the p-n junction of solar cells, so the stability of the spare parts of the diffusion equipment is particularly important for the diffusion quality and the photoelectric conversion efficiency of solar cells. Taking the thermal diffusion process of n-type semiconductor surface doping with trivalent boron as an example, the liquid BCL3 or BBr3 is used as a diffusion source to fully decompose and react under hi...

Claims

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Application Information

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IPC IPC(8): G01F25/10
Inventor 吴宇汪松柏
Owner WUXI SUNTECH POWER CO LTD
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