Preparation method and structure of microcomputer electromagnetic gate sensor

Abstract

The embodiment of the invention discloses a preparation method and a structure of a microcomputer electromagnetic gate sensor, and the method comprises the steps: obtaining a substrate and a to-be-prepared thin strip which is made of an iron-based or cobalt-based material, preparing a first sub-coil on the substrate, adhering the to-be-prepared thin strip to the substrate, and obtaining the to-be-prepared substrate, and preparing a magnetic line collector group and a magnetic core on the substrate to be prepared by wet etching, preparing a second sub-coil, and connecting the first sub-coil with the second sub-coil to obtain the microcomputer electromagnetic through-gate sensor. According to the method, the magnetic force line collector group and the magnetic core of the iron-based thin strip or the cobalt-based thin strip are prepared by utilizing a wet etching process, so that the position control accuracy can be improved, and the micro-assembly error is reduced. The magnetic line collector group is additionally arranged on the substrate, so that the magnetic field gathering capability, the resistance to the magnetic impact of a large magnetic field, the detection resolution, the stability and the impact resistance of the microcomputer electromagnetic through gate sensor can be improved, and the application scene of the microcomputer electromagnetic through gate sensor is expanded.

Description

technical field [0001] The invention relates to the field of device preparation, in particular to a preparation method and structure of a microcomputer electromagnetic pass-gate sensor. Background technique [0002] Flux Gate Principle Flux Gate is that the inductance of the easily saturable magnetic core changes with the excitation current under the action of the excitation current, which in turn leads to the change of the magnetic flux. The fluxgate sensor prepared based on the fluxgate principle is widely used in the detection of submarines as a detection device for weak magnetic fields. In recent years, as attitude sensitive sensors, it has been widely used in satellite launch, launch vehicles, spacecraft and other fields. [0003] The traditional fluxgate sensor is made by mechanically winding a coil on a high-conductivity magnetic core. The fluxgate sensor made by this method is large in volume, high in mass production cost and large in assembly error. The matching d...

AI Technical Summary

Problems solved by technology

There is a certain gap between the detection sensitivity of the existing MEMS fluxgate sensor and the traditional fluxgate sensor, and it needs to be improved in the field of high-precision detection

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