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Control method for seed crystal orientation in crystal growth process

A technology for crystal growth and control methods, applied in crystal growth, single crystal growth, chemical instruments and methods, etc., can solve problems such as inability to adjust, inclination deviation, and difficulty, and achieve compact design, convenient operation, and time-saving repeatability. Effect

Inactive Publication Date: 2005-07-27
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, after the center position of the seed crystal is adjusted properly, its inclination angle often has a large deviation and it is difficult or impossible to adjust; or conversely, it is difficult or impossible to adjust the center position of the seed crystal after adjusting the inclination angle of the seed crystal

Method used

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  • Control method for seed crystal orientation in crystal growth process
  • Control method for seed crystal orientation in crystal growth process
  • Control method for seed crystal orientation in crystal growth process

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Embodiment Construction

[0039] specific implementation

[0040] The present invention will further describe embodiment in conjunction with accompanying drawing:

[0041] A method for controlling the orientation of a seed crystal in a crystal growth process, comprising the following steps: (1) selecting a seed crystal 3 through crystal orientation and processing, whose end face is an expected crystal plane for crystal growth; (2) selecting The good seed crystal 3 is fixed on the seed crystal rod 1 of the seed crystal fixture; then the seed crystal fixture is fixed on the shaft rod 4 of the single crystal growth equipment; (3) the inclination angle of the seed crystal rod 1 relative to the Z-axis direction is adjusted so that The deviation between the end face of the seed crystal and the horizontal reference line is 0-±0.2°; (4) adjust the displacement of the X and Y directions of the seed crystal clamp, so that the center of the end face of the seed crystal and the shaft rod of the equipment on which ...

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Abstract

The seed crystal orientation controlling method includes the following steps: selecting seed crystal end after crystal orientation and processing as the expected growth crystal plane; fixing the seed crystal on the seed crystal rod of seed crystal clamp before fixing the seed crystal clamp onto the shaft rod of the monocrystal growing equipment; regulating the slant of the seed crystal rod to Z-axis to make the deviation between the end of the seed crystal and the horizontal datum line within 0.2 deg and regulating the direction to make the deviation between the seed crystal axis and shaft rod axis within 0.2 mm; with the regulating steps being repeated if necessary. The present invention can regulate the central position and angle of the seed crystal conveniently and reliably in high repeatability.

Description

technical field [0001] The invention relates to a control method for orientation adjustment, in particular to a control method for seed crystal orientation in a crystal growth process. Background technique [0002] In some common crystal growth techniques, such as floating zone method, pulling method, top seed method (or Kyropoulos method), etc., in order to make the crystallization process easy to occur and make the crystal growth proceed in the expected crystallographic direction, it is usually necessary to use seed crystal. At the same time, in order to avoid the radial asymmetry of the temperature field and ensure the quality of crystal growth, the seed crystal should be in the heating center of the growth equipment during the rotation or displacement process, usually the geometric center of the growth area of ​​the single crystal growth equipment. To sum up, the orientation control of the seed crystal in the crystal growth technology should meet two requirements: (a) T...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/32C30B35/00
Inventor 周放吴祖安遆文新熊季午赵忠贤
Owner INST OF PHYSICS - CHINESE ACAD OF SCI