Driving device, method and procedure of spray nozzle, liquid drop spray out device and its manufacturing method

Abstract

The present invention provides a head driving device and method capable of ejecting a necessary amount of a viscous body from a head including a pressure generating element, such as a piezoelectric element, a droplet ejecting apparatus including the head driving device, a head driving program, and a device manufacturing method including, as one manufacturing step, a step of ejecting a viscous body using the method. The invention can be achieved by applying a drive signal COM to a pressure generating element, such as a piezoelectric element included in a head. A clock signal can be supplied to a drive signal generating circuit that generates the drive signal COM. The drive signal generating circuit generates the drive signal in synchronization with the clock signal. According to the present invention, the rate of change in voltage value of the drive signal per unit time is changed by changing the frequency of the clock signal in accordance with a deformation rate of the pressure generating element per unit time.

Description

technical field [0001] The present invention relates to a nozzle driving device and method, a droplet ejection device, a nozzle driver, and a device manufacturing method and device, in particular to a nozzle driving device and method for driving a nozzle that ejects a viscous body such as liquid resin with high viscosity , a droplet ejection device having the head drive device, a head driver program, and a liquid crystal display device, an organic EL (Electro luminescence) display, and a color filter including a step of ejecting a viscous body by the above-mentioned method as one of the steps Device fabrication methods and devices for substrates, microlens arrays, optical elements with coatings, and other devices. Background technique [0002] In recent years, various electronic devices such as computers and portable information devices have been rapidly developed. With the development of these electronic devices, electronic devices equipped with liquid crystal display devic...

AI Technical Summary

Problems solved by technology

As mentioned above, the conventional nozzle driving device is designed to vibrate the piezoelectric element at high speed, and the time required for rising or falling can only be set to about 102.4 μs at the longest, so it is impossible to simply drive the nozzle for general household use. The problem that the device is used as a head drive device for a droplet discharge device that discharges a high-viscosity viscous body

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