Driving device, method and procedure of spray nozzle, liquid drop spray out device and its manufacturing method
A technology of a driving device and a driving method, which is applied to a printing device, an inking device, a device for coating liquid on a surface, etc.
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[0049] Referring to the accompanying drawings, a device and method for driving a nozzle, a device for ejecting droplets, a program for driving a nozzle, and a device manufacturing method and device according to an embodiment of the present invention will be described in detail below. In the following description, first, an example of a device manufacturing device having a droplet ejection device, a device manufacturing device used in manufacturing a device, a device manufactured using the device manufacturing device, and a device manufacturing method will be described, and then sequentially described. The nozzle driving device, the nozzle driving method and the nozzle driver program in the output device.
[0050] (Overall structure of device manufacturing apparatus having droplet ejection device)
[0051] figure 1 It is a plan view showing the overall structure of a device manufacturing apparatus including a droplet ejection apparatus according to an embodiment of the present...
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