Method for measuring position of zero optical path difference in dual beam interference of wideband light source
A double-beam interference and zero optical path difference technology, applied in the field of photoelectric sensing and detection technology, can solve the problem of low precision
Inactive Publication Date: 2005-12-28
TIANJIN UNIV
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Although the measurement sensitivity of a fraction of the wavelength of the interfering light can be obtained by using the differential method in interferometry, for the absolute measurement of the position of zero optical path difference, the accuracy of the currently used method is relatively low
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[0023] Mount the optics according to the attached figure 1 The position shown is adjusted well. Assuming that the central wavelength of the light source used for a measurement is 1.2 μm, and the displacement is 1 / 4 of the wavelength, the sampling displacement is 0.3 μm. The light intensity ratio of the double beams is: 10:8; the measurement error of the interference light intensity is: 0.5%; the mechanical positioning error is: 0.05 μm. The measurement data obtained according to the above measurement and calculation methods are shown in Table 1.
[0024] Measuring position
[0025] Since the value of the modulation degree is determined by the magnitude of the five interfering light intensities near the measurement position, two modulation degree data are missing at the beginning and end of the corresponding modulation degree data in the measurement data table of this embodiment. The initial position measured in this embodiment is 0, and the position of zero optical...
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The purpose of the present invention is to provide a method for quickly and accurately measuring the interference zero optical path difference position of a double-beam broadband light source. The broadband light composed of LED (1) and LD (2) light source is incident into the one-way coupler (3), and the two-way coupler (4) couples the light emitted by the one-way coupler to the light sensor (5) and the matching arm respectively (6), and output the reflected light of the optical sensor and the matching arm to the interferometer (7). Taking 1 / 4 of the interference light wavelength as the sampling step, the interference light intensity of the sampling points is detected at equal intervals, and then the interference modulation degree distribution is obtained by the calculation formula. The maximum position of the distribution is the zero optical path difference position of the double-beam interference. The present invention can accurately determine the degree of interference modulation of light sources whose coherence length distribution is similar to the Fermi-Dirac statistical distribution, and is also applicable to the measurement of the maximum position of interference modulation degrees of other light sources, and can be widely used to measure the absolute position as Optical sensing measurement of basic quantities and related applications.
Description
technical field [0001] The invention relates to a method of photoelectric sensor detection technology. technical background [0002] The interferometry method is an important means adopted in the photoelectric sensing detection technology. It realizes the measurement of physical quantities with displacement as the basic quantity by using phase measurement technology. Although the measurement sensitivity of a fraction of the interference light wavelength can be obtained by using the differential method in interferometry, the accuracy of the currently used method for the absolute measurement of the zero optical path difference position is relatively low. The interferometry method using broadband light source developed in recent years can not only realize the absolute measurement of zero optical path difference position, but also has the advantages of high resolution, strong anti-interference ability, high precision and convenient operation, so it is mo...
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IPC IPC(8): G01B9/02G01B11/02G01D5/12
Inventor 刘铁根孙杰张以谟江俊峰
Owner TIANJIN UNIV