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Device and method for parallel testing semiconductor device

A semiconductor and device technology, applied in the direction of single semiconductor device testing, semiconductor/solid-state device testing/measurement, measuring devices, etc.

Inactive Publication Date: 2006-02-22
IBM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This time is much longer than the usual operation time of several to tens of nanoseconds for LSI

Method used

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  • Device and method for parallel testing semiconductor device
  • Device and method for parallel testing semiconductor device
  • Device and method for parallel testing semiconductor device

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Embodiment Construction

[0022] see figure 1 , which shows an apparatus capable of parallel testing on a chip including logic and embedded memory. An essential element of the apparatus provides independent timing of the logic and memory test sequences. The independent clocking capability allows loading of logic test patterns and results in independent offloading of the memory test clocking requirements. The timing signal is provided by the external tester 10 to the clock multiplier and control circuit 11 . During the test process 20, the clock multiplier circuit 11 provides test clock signals 12, 13, 14 to provide independent clock signals to the logic part 21 and the BIST on the memory macro part 23 of the chip.

[0023] In an optional scheme, the clock signal from the tester 10 can be applied to the clock generator 25, and this clock generator 25 can directly generate the clock signal 12, 13, 14 or provide the clock multiplier control circuit 11 A signal which in turn generates said clock signals...

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Abstract

Technique to perform logic and embedded memory tests using logic scan chain testing procedures in parallel with memory built in self test (BIST). This is accomplished with a combination of voltage isolation between memory and logic segments, and isolation between logic and memory test clocks. A test algorithm is introduced to enable and disable the scan chain operation during BIST operation.

Description

technical field [0001] The present invention generally relates to an apparatus for testing logic and embedded memory in a semiconductor integrated circuit device located on the same chip. Background technique [0002] Recently, various types of semiconductor integrated circuit devices (hereinafter referred to as LSIs) having various memory built-in structures have been put into practical use. For example, for high-speed data processing, a plurality of small-capacity memories are provided on the same substrate as data processing buffers, or a large-capacity memory such as a cache memory of a microprocessor is provided on the same substrate. [0003] In this way, not only the scale of the LSI is increased, but also the safety of the test coverage is enhanced, the test time which is constantly increasing is shortened, etc., which have become significant problems in performing the functional test of the LSI. [0004] Generally, the internal combinational circuit including the l...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66G01R31/28G01R31/26G01R31/3185G11C29/48
CPCG11C2207/104G11C2029/3202G11C29/48G01R31/318572G11C2029/2602G01R31/26H01L22/00
Inventor W·R·科尔宾B·R·凯斯勒E·A·纳尔逊T·E·奥布雷姆斯基D·L·威特尔
Owner IBM CORP