Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator
A space division multiplexing and actuator technology, which is applied in the field of measurement and control, can solve the problem of difficult balance of the bridge, and achieve the effect of promoting integration and miniaturization, reducing design difficulty and improving control stability.
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Embodiment 1
[0018] Such as figure 2 , The present invention includes a piezoelectric self-sensing actuator 1, an actuator drive power circuit 2 and a short-circuit current measuring circuit 3. The piezoelectric self-sensing actuator 1 is composed of a piezoelectric ceramic / crystal 4, a ground electrode 5, a sensing electrode 6, an actuator electrode 7, and an electrode wiring board 8. The interdigital sensor electrode 6 and the actuator electrode 7 are arranged crosswise. The electrode wiring board 8 is fixed on the outer package of the piezoelectric self-sensing actuator, the lead wires of the ground electrode 5, the sensing electrode 6 and the actuator electrode 7 are connected to the electrode wiring board 8, and the ground electrode 5 is grounded. Actuator drive power circuit 2 is an AC voltage source, V in One end is connected to the executive electrode 7 through the electrode terminal board 8, V in The other end is grounded. The short-circuit current measurement circuit 3 consists of a...
Embodiment 2
[0020] Such as image 3 As shown, the piezoelectric self-sensing actuator 1 can also adopt the way of dividing electrodes in the shape of a circle. The piezoelectric self-sensing actuator 1 is divided into three layers, the middle layer is the piezoelectric ceramic / crystal 4, the lower layer is the common ground electrode 5, and the upper layer is the sensor electrode 6 and the actuator electrode 7 divided in a circle. If the piezoelectric ceramic / crystal 4 is square, the electrode is divided into a round shape, and if the piezoelectric ceramic / crystal 4 is circular, the electrode is divided into a ring shape. Perform an arrangement of electrodes and sensitive electrodes alternately.
Embodiment 3
[0022] Such as Figure 4 As shown, the piezoelectric self-sensing actuator 1 can also adopt an all-electrode multiplexing mode. The piezoelectric self-sensing actuator 1 is divided into five layers, from bottom to top: the first layer is the common ground electrode 5; the second layer is the piezoelectric ceramic / crystal 4, which can be monolithic or stacked; the third layer It is the actuator electrode layer 7; the fourth layer is an insulating sensing layer 9 with a thickness of 0.1-0.3 mm, and the fifth layer is the sensing electrode layer 6. The structure of the first three layers is no different from that of conventional actuators. The insulating sensing layer 9 has two functions: one is to insulate and prevent a short circuit between the executive electrode and the sensing electrode; the other is to couple the charge on the executive electrode to the sensing electrode.
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