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Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator

A space division multiplexing and actuator technology, which is applied in the field of measurement and control, can solve the problem of difficult balance of the bridge, and achieve the effect of promoting integration and miniaturization, reducing design difficulty and improving control stability.

Inactive Publication Date: 2006-07-19
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a new decoupling method for the realization of piezoelectric self-sensing actuators - space division multiplexing method, to solve the problem that the bridge is not easy to balance in the bridge decoupling method

Method used

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  • Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator
  • Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator
  • Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator

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Embodiment 1

[0018] Such as figure 2 , The present invention includes a piezoelectric self-sensing actuator 1, an actuator drive power circuit 2 and a short-circuit current measuring circuit 3. The piezoelectric self-sensing actuator 1 is composed of a piezoelectric ceramic / crystal 4, a ground electrode 5, a sensing electrode 6, an actuator electrode 7, and an electrode wiring board 8. The interdigital sensor electrode 6 and the actuator electrode 7 are arranged crosswise. The electrode wiring board 8 is fixed on the outer package of the piezoelectric self-sensing actuator, the lead wires of the ground electrode 5, the sensing electrode 6 and the actuator electrode 7 are connected to the electrode wiring board 8, and the ground electrode 5 is grounded. Actuator drive power circuit 2 is an AC voltage source, V in One end is connected to the executive electrode 7 through the electrode terminal board 8, V in The other end is grounded. The short-circuit current measurement circuit 3 consists of a...

Embodiment 2

[0020] Such as image 3 As shown, the piezoelectric self-sensing actuator 1 can also adopt the way of dividing electrodes in the shape of a circle. The piezoelectric self-sensing actuator 1 is divided into three layers, the middle layer is the piezoelectric ceramic / crystal 4, the lower layer is the common ground electrode 5, and the upper layer is the sensor electrode 6 and the actuator electrode 7 divided in a circle. If the piezoelectric ceramic / crystal 4 is square, the electrode is divided into a round shape, and if the piezoelectric ceramic / crystal 4 is circular, the electrode is divided into a ring shape. Perform an arrangement of electrodes and sensitive electrodes alternately.

Embodiment 3

[0022] Such as Figure 4 As shown, the piezoelectric self-sensing actuator 1 can also adopt an all-electrode multiplexing mode. The piezoelectric self-sensing actuator 1 is divided into five layers, from bottom to top: the first layer is the common ground electrode 5; the second layer is the piezoelectric ceramic / crystal 4, which can be monolithic or stacked; the third layer It is the actuator electrode layer 7; the fourth layer is an insulating sensing layer 9 with a thickness of 0.1-0.3 mm, and the fifth layer is the sensing electrode layer 6. The structure of the first three layers is no different from that of conventional actuators. The insulating sensing layer 9 has two functions: one is to insulate and prevent a short circuit between the executive electrode and the sensing electrode; the other is to couple the charge on the executive electrode to the sensing electrode.

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Abstract

This invention relates to an integration method for piezo-electric sensor and piezo-electric performer and belongs to the field of observation and control technique. And it features with simultaneous application of positive and converse piezo-electric effect on one slice of piezo-electric ceramics or crystal and with the realization of piezo-electricity self-perception performer through space-division multiplexing decoupling method. The lower electrode of piezo-electricity ceramics or crystal serves as common earth electrode and the upper electrode is divided into two pluralities, one serves as execution electrode and the other serves as sensing electrode. Driving alternate voltage that exerted between the execution electrode and the earth electrode generates dynamic displacement, velocity and driving force. Virtual short circuit is located between the sensing electrode and the earth electrode so as to get the velocity of the performer and its mechanic structures from the short-circuit current measured by the ultra-low bias current operational amplifier.

Description

Technical field [0001] The invention belongs to the technical field of measurement and control, and relates to a method for integrating the functions of a piezoelectric sensor and an actuator. Background technique [0002] Many applications require both actuators and sensors. The actuator produces displacement or force; the sensor measures physical quantities such as displacement and force, and sensors are needed for both open-loop monitoring and closed-loop control. The usual technical route for building a closed-loop system is to use independent sensors and independent actuators. The disadvantage of this method is that it is not conducive to co-location control, and is not convenient for system integration and miniaturization. Using the two-way electromechanical reversible conversion effect of the transducer device, a device has both sensing and performing functions at the same time. This kind of device is called a self-sensing actuator. Self-sensing actuator is a new technolog...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/16G01L1/16H01L41/04H10N30/80
Inventor 董维杰王旭东李涵
Owner DALIAN UNIV OF TECH