Single piece of pneumatic gelatious tiny valve

A gel, microvalve technology, applied in microstructure devices without moving elements, microstructure devices composed of elements that move relative to each other, valve operation/release devices, etc. The problem of slow response time and unfavorable manufacturing structure of micro valve actuating components achieves the effects of simple structure, low energy consumption for opening, and strong continuous actuation capability.
CN1313355CInactive Publication Date: 2007-05-02SHANGHAI JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI JIAOTONG UNIV
Publication Date
2007-05-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

A pneumatic single-plate gel microvalve is composed of a silicone rubber substrate and a glass substrate. On said silicone rubber substrate, there are main channel, current limiting channel, slide way, the actuating cavity, sampling inlet channel and actuating gas channel of oxygen micropump, auxiliary channel, auxiliary outlet and gel microcore. On said glass substrate, there are heating microelectrode, sensing microelectrode, sample solution inlet and outlet, H2O2 inlet and auxiliary gas outlet.
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Description

technical field

[0001] The invention relates to a microvalve in the technical field of micro-electromechanical systems, in particular to a micropump with a single-chip aerodynamic gel microvalve. Background technique

[0002] A valve is an important device that acts as a controlled flow restriction in a flow channel. Micro-valves based on micro-electro-mechanical systems (MEMS) processing technology can generally be divided into two types according to the principle: active valves and passive valves. The working characteristic of the passive valve is that the change of the valve state can be realized only by the change of the fluid itself. The volume of the microvalve can be greatly reduced to match the level of the chip; the corresponding processing and integration difficulties are also reduced. However, its function is relatively simple, and complex operations cannot be realized, and its application has certain limitations. The active valve is to use the actuation force ...

Claims

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