Single piece of pneumatic gelatious tiny valve

A gel, microvalve technology, applied in microstructure devices without moving elements, microstructure devices composed of elements that move relative to each other, valve operation/release devices, etc. The problem of slow response time and unfavorable manufacturing structure of micro valve actuating components achieves the effects of simple structure, low energy consumption for opening, and strong continuous actuation capability.

Inactive Publication Date: 2007-05-02
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the need to heat and cool the gas-liquid mixture, the response time of the thermopneumatically actuated microvalve is slow; in addition, the deformable membrane of the microvalve is in contact with the flow channel of the fluid or gas, so the temperature of the deformable membrane may affect the fluid or gas in the flow path. temperature, and vice versa
[0004] In addition, the above-mentioned valves all use silicon processing and packaging technology, which puts forward high requirements for production, and the production cost is high, and the relatively complicated structure of the microvalve actuating parts is not conducive to production.

Method used

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  • Single piece of pneumatic gelatious tiny valve
  • Single piece of pneumatic gelatious tiny valve
  • Single piece of pneumatic gelatious tiny valve

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Embodiment Construction

[0020] As shown in FIG. 1 , the present invention consists of a silicone rubber substrate 1 and a glass substrate 2 , and the glass substrate 2 is arranged above the silicone rubber substrate 1 . The silicone rubber substrate 1 includes a main channel 3, a flow-limiting channel 4, a gel microvalve slideway 5, a micro-oxygen pump actuation cavity 6, a micro-oxygen pump sampling channel 7, a micro-oxygen pump actuation airway 8, an auxiliary Channel 9, auxiliary air outlet 10, gel microvalve spool 17, the main channel 3 and the gel microvalve slideway 5 are perpendicular to each other on the silicone rubber substrate 1, and the end of the main channel 3 is connected with one end of the flow-limiting channel 4, And the flow-limiting channel 4 is located in the center of the main channel 3 in the width direction, and is perpendicular to the gel microvalve slideway 5, the gel microvalve spool 17 is in the gel microvalve slideway 5, and the micro oxygen pump actuation chamber There ...

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Abstract

A pneumatic single-plate gel microvalve is composed of a silicone rubber substrate and a glass substrate. On said silicone rubber substrate, there are main channel, current limiting channel, slide way, the actuating cavity, sampling inlet channel and actuating gas channel of oxygen micropump, auxiliary channel, auxiliary outlet and gel microcore. On said glass substrate, there are heating microelectrode, sensing microelectrode, sample solution inlet and outlet, H2O2 inlet and auxiliary gas outlet.

Description

technical field [0001] The invention relates to a microvalve in the technical field of micro-electromechanical systems, in particular to a micropump with a single-chip aerodynamic gel microvalve. Background technique [0002] A valve is an important device that acts as a controlled flow restriction in a flow channel. Micro-valves based on micro-electro-mechanical systems (MEMS) processing technology can generally be divided into two types according to the principle: active valves and passive valves. The working characteristic of the passive valve is that the change of the valve state can be realized only by the change of the fluid itself. The volume of the microvalve can be greatly reduced to match the level of the chip; the corresponding processing and integration difficulties are also reduced. However, its function is relatively simple, and complex operations cannot be realized, and its application has certain limitations. The active valve is to use the actuation force ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B1/00F16K31/68G01N27/447B81B5/00
Inventor 陈文元牛志强贾晓宇张卫平
Owner SHANGHAI JIAOTONG UNIV
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