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Method for mfg. single sheet pneumatic gel mini valve

A manufacturing method and gel technology, applied in the field of monolithic aerodynamic gel microvalve manufacturing, can solve the problems of unfavorable microfluidic systems, high requirements for operators, and high manufacturing costs of micropumps, and achieve low energy consumption for opening and promote The effect of development, simple structure

Inactive Publication Date: 2005-11-09
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process of the microvalve is complicated. Since it involves the processing of three substrates, the processing procedures of each substrate are relatively complicated, and the requirements for processing equipment are relatively high; moreover, the bonding process needs to be operated under high temperature and high pressure conditions. Operators have higher requirements
In summary, the high manufacturing cost of the micropump is not conducive to its practical application in microfluidic systems.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0030] A. Rapid preparation of micro-replication template: adopt SU-850 negative photoresist (USA Micro Chem Company), spin the glue condition at 500rpm for 1 minute, obtain a photoresist with a thickness of 1000μm, and pre-bake at 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 600 seconds, medium baking condition is 95°C for 30 minutes, development time is 15 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0031] B. Replication of the template pattern: Mix Dow Corning's sylgard18...

Embodiment 2

[0049] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0050] A. Rapid preparation of micro-replication template: adopt SU-850 negative photoresist (Micro Chem Company, USA), the condition of spinning the glue is 2000rpm for 1 minute, and obtain a photoresist with a thickness of 200μm, and the pre-baking condition is 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 100 seconds, medium baking condition is 95°C for 30 minutes, development time is 5 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0051] B. Replication of the template patte...

Embodiment 3

[0069] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0070] A. Rapid preparation of micro-replication template: use SU-850 negative photoresist (Micro Chem, USA), spin the glue at 1000rpm for 1 minute, obtain a photoresist with a thickness of 800μm, and pre-bake at 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 300 seconds, medium baking condition is 95°C for 30 minutes, development time is 5 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0071] B. Replication of the template pattern: Mix Dow Corning's sylgard184A solution and sylg...

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Abstract

A process for preparing the single-chip pneumatic gel microvalve includes such steps as preparing copying microtemplate by fast prototype technique, casting silicone rubber to obtain substrate with pump cavity and microchannels, plasma etching to obtain glass substrate with heating and sensing electrodes, reactive ion treating for packaging said both substrates, and ultraviolet catalyzing to gel prepolymer to obtain the gel core of microvalve.

Description

technical field [0001] The invention relates to a method for manufacturing a microvalve in the field of micro-electromechanical systems, in particular to a method for manufacturing a single-chip aerodynamic gel microvalve. Background technique [0002] A valve is an important device that acts as a controlled flow restriction in a flow channel. Micro-valves based on micro-electro-mechanical systems (MEMS) processing technology can generally be divided into two types according to the principle: active valves and passive valves. The working characteristic of the passive valve is that no external actuation force is required; only the change of the fluid itself parameters (such as flow direction, flow pressure, etc.) can realize the change of the valve state. The volume of the microvalve can be greatly reduced to match the level of the chip; the corresponding processing and integration difficulties are also reduced. However, its function is relatively simple, and complex operat...

Claims

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Application Information

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IPC IPC(8): B81C1/00
Inventor 陈文元牛志强张卫平贾晓宇
Owner SHANGHAI JIAO TONG UNIV
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