Method for mfg. single sheet pneumatic gel mini valve

Abstract

A process for preparing the single-chip pneumatic gel microvalve includes such steps as preparing copying microtemplate by fast prototype technique, casting silicone rubber to obtain substrate with pump cavity and microchannels, plasma etching to obtain glass substrate with heating and sensing electrodes, reactive ion treating for packaging said both substrates, and ultraviolet catalyzing to gel prepolymer to obtain the gel core of microvalve.

Description

technical field

[0001] The invention relates to a method for manufacturing a microvalve in the field of micro-electromechanical systems, in particular to a method for manufacturing a single-chip aerodynamic gel microvalve. Background technique

[0002] A valve is an important device that acts as a controlled flow restriction in a flow channel. Micro-valves based on micro-electro-mechanical systems (MEMS) processing technology can generally be divided into two types according to the principle: active valves and passive valves. The working characteristic of the passive valve is that no external actuation force is required; only the change of the fluid itself parameters (such as flow direction, flow pressure, etc.) can realize the change of the valve state. The volume of the microvalve can be greatly reduced to match the level of the chip; the corresponding processing and integration difficulties are also reduced. However, its function is relatively simple, and complex operat...