Monolithic unidirectional liquid micropump having suspension T shaped valve film micro valve

A technology of micro-valve and valve membrane, which is applied in the direction of liquid variable capacity machinery, pumps with flexible working elements, pumps, etc.

Inactive Publication Date: 2004-10-06
汤玉生
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This multi-level micropump structure is not suitable for on-chip microsystem applications

Method used

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  • Monolithic unidirectional liquid micropump having suspension T shaped valve film micro valve
  • Monolithic unidirectional liquid micropump having suspension T shaped valve film micro valve
  • Monolithic unidirectional liquid micropump having suspension T shaped valve film micro valve

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Embodiment 1

[0027] Such as Figure 5 As shown, the process of manufacturing the monolithic one-way liquid micropump with suspended T-shaped valve membrane microvalve according to the present invention by adopting the anodic oxidation voltage switching technology with multiple processing areas overlapping each other is as follows:

[0028] 1. The etching and filling of the valve film release silicon groove: select the low-resistance P-type silicon wafer 2 of 0.01-0.015 Ωcm for use; LPCVD deposits silicon nitride 24 with a thickness of 0.2-0.3 microns; silicon groove pattern photolithography, The width of the silicon groove is 0.2-1.2 microns; the deep silicon groove is etched by plasma, partially oxidized at high temperature, and the silicon groove is filled with thermally grown silicon dioxide 24 .

[0029] 2. Silicon recess etching of the valve film: remove the silicon nitride after local oxidation, and perform chemical mechanical polishing on the silicon wafer; LPCVD deposits silicon ni...

Embodiment 2

[0038] Such as Figure 6 As shown, the processing process of the monolithic unidirectional liquid micropump with the suspended T-shaped valve membrane microvalve of the present invention manufactured by monocrystalline silicon thin film transfer technology is as follows:

[0039] 1. Valve membrane groove etching: Choose silicon wafer with (100) or (110) crystal orientation, no limit on resistivity; high temperature and wet oxygen oxidation, silicon dioxide 27 thickness is 0.6 microns; valve membrane groove 28 graphic light Engraving; shallow silicon wet etching, the etching depth is 3-5 microns.

[0040] 2. Silicon pre-etching in the valve cavity area: remove the original silicon dioxide mask; again high-temperature wet oxygen oxidation, silicon dioxide 27 thickness is 1.2 microns; LPCVD deposited silicon nitride 24, 0.2-0.3 microns thick, photo Engraving the micropump cavity, microvalve cavity and microchannel pattern; plasma etching silicon nitride 24, photolithography valv...

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Abstract

A single sheet type monodirectional liquid micropump with the microvalve having suspended T-shaped valve membrane is prepared on the basis of anodizing voltage switching technique and monosilicon film transfer technique. Its advantages are low energy consumption for opening it and high borne pressure when it is closed.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems (MEMS), in particular to a gas-liquid silicon membrane micropump and a manufacturing method, in particular to a monolithic one-way liquid silicon membrane microvalve with a suspended T-shaped valve membrane microvalve. Pump and method of manufacture. Background technique [0002] Most of the microvalves in the existing silicon membrane micropumps contain silicon elastic membranes. To open the microvalves, the micropump needs to overcome the elastic force of the valve membrane to deform the valve membrane and create a gap for the fluid to pass through. Therefore, opening the microvalve requires a certain amount of energy consumption, which has an adverse effect on the efficiency of the micropump. The thicker the valve membrane, the greater the energy consumption, and the lower the efficiency of the micropump. However, in order to ensure that the microvalve can withstand sufficient pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04
Inventor 汤玉生
Owner 汤玉生
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