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Electric-static micro exciter, method for activating said exciter and photographic moudle

An exciter, electrostatic technology, applied in the direction of electrostatic motor, electrostatic generator/motor, generator/motor, etc., can solve the problems of cost increase, time-consuming, complex assembly tasks, etc., and achieve vertical vibration suppression, smooth and reliable operation Effect

Inactive Publication Date: 2003-03-26
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This requires a time-consuming and complex assembly task, which leads to increased costs, something that must be overcome for the mass production of such high-precision actuators
[0011] Moreover, since the movable member in this electrostatic actuator vibrates between the juxtaposed stationary parts 103a and 103b with a large amplitude relative to the pitch-by-pitch lateral movement, its fine movement is not satisfactory smooth, and thus it is desirable Improvements to both the actuator physics and the operating mechanism

Method used

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  • Electric-static micro exciter, method for activating said exciter and photographic moudle
  • Electric-static micro exciter, method for activating said exciter and photographic moudle
  • Electric-static micro exciter, method for activating said exciter and photographic moudle

Examples

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no. 1 example

[0065] Fig. 1 is a schematic diagram showing the structure of an exemplary embodiment of an electrostatic actuator according to the present invention. The same reference numerals as used in FIGS. 24 and 25 designate corresponding components in FIG. 1 .

[0066] This exemplary electrostatic actuator is composed of first and second stationary members 2 a and 2 b facing each other, and a movable member 3 positioned therebetween and movable in the direction indicated by arrow 24 .

[0067] The first and second stationary parts 2a and 2b may be plate-like in shape, or alternatively may be semi-cylindrical in shape. When the first and second stationary parts 2a and 2b have a plate-like shape, the movable part 3 may thus be shaped as a solid or hollow block with opposite, almost flat surfaces facing the stationary parts, or when the first and second When the second stationary parts 2a and 2b have a semi-cylindrical shape, the movable part 3 can be correspondingly shaped as a solid o...

no. 2 example

[0088] A second embodiment of the electrostatic actuator will now be described with improved characteristics for adjusting the balance of voltages applied to the active and lower electrodes.

[0089] The inventors looked at the first embodiment of the electrostatic actuator and obtained some quantitative observations about the gap between the stationary part 2a and the movable part 3 and the voltage applied to the electrodes.

[0090] In order to fully understand this embodiment, the outline of the mechanical structure will be described.

[0091] Figure 6 is a sectional view showing the mechanical structure of the electrostatic actuator of the embodiment of the present invention. The active electrodes A to D and the lower electrode E have their respective working surfaces covered with a protective film 4 respectively. The protective film 4 is an insulating material such as an inorganic composition including silicon oxide and silicon nitride, and an organic composition inclu...

no. 3 example

[0118] Next, a third embodiment of the present invention will be described, which is an electrostatic actuator having a well-balanced electrode area of ​​the excitation electrode with respect to the lower electrode.

[0119] In this embodiment, instead of adjusting the voltage applied to each electrode as described for the second embodiment, the areas where the upper and lower electrodes face each other are adjusted to maintain a well-balanced state of attractive force between those electrodes.

[0120] For example, to activate electrodes A to D as figure 2 As described, the strips are configured in repeating fashion, and the voltage is applied to a specific set(s) of electrodes. In response to this, the lower electrode E forms an attractive force.

[0121] As for image 3 In the sequence of operations shown, only one group of the same branch electrodes A, B, C or D is applied with a voltage at the same time as the voltage is applied to the lower electrode E. In this way, ...

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Abstract

An object of the present invention is to provide an electrostatic actuator that can be easily assembled and suitably mass-produced and that can implement requirements of both the steady, smooth and stable operation and the enhanced reliability. The present invention is also directed to a method of activating such an electrostatic actuator, and a camera module used with the same.

Description

[0001] Cross-comparison of related applications [0002] This application is based on and claims the benefit of a prior Japanese Patent Application No. 2001-283533 with a filing date of September 18, 2001; the entire contents of which are hereby incorporated by reference. technical field [0003] This invention relates to electrostatic microactuators, methods of activating such actuators, and camera modules for use with such actuators, and in particular to electrostatically propelled, easily assembled, improved smoothness in actuation, stable and reliability of electrostatic microactuators, methods of activating such electrostatic microactuators, and camera modules for use with such actuators. Background technique [0004] In recent years, there has been an unabated demand for miniaturized linear actuators with ever-reduced size design, precise operation, and reduced cost, such as for adjustment of the focus of ultra-compact cameras. An example of solving this need is an el...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/08G02B7/04H02N1/00
CPCH02N1/004
Inventor 古贺章浩秋叶敏克吉田充伸服部俊介
Owner KK TOSHIBA
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