Spectrum face coordinate calibrating device for digital scanning optical transfer function detector
An optical transfer function and digital scanning technology, applied in the field of optical inspection, can solve the problems of audio-visual errors, inaccurate optical system transfer function values, and inaccurate spectral coordinate position calibration, and achieve the effect of high precision.
Inactive Publication Date: 2004-12-15
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0004] Because the device uses a stopwatch to measure time, it is artificially controlled, and there are audio-visual errors, which make the calibration of the coordinate position of the spectral surface inaccurate. Therefore, it is also inaccurate to test the transfer value of the optical system with such an optical transfer function tester, which affects the optical system. System imaging quality to make a correct evaluation
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[0016] The present invention is figure 2 The shown structure is implemented, wherein the illumination light source 7 adopts a 12V24W iodine-tungsten lamp; the rectangular slit group turntable 14 adopts 8 rectangular slits with different widths; the orientation adjustment mechanism 17 adopts an adjustment mechanism with two-dimensional movement of X and Y, and the material is 45 steel; Microscopic objective lens 18 adopts high-quality 10x objective lens; Micrometer eyepiece 22 adopts 10x eyepiece;
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The present invention belongs to the field of optical detection technology. The spectrum surface coordinate calibrating device for digital scanning optical transfer function instrument includes standard rectangular slot target source, microscopic imaging system and interface assembly for the calibrated optical transfer function instrument. In the device, the standard rectangular slot target source is located in the left, and the microscopic imaging system in the middle has right end connected to the flange of the image analyzer. The optical axle of the standard rectangular slot target source is coincided with that of the microscopic imaging system, so that the object space focus of the microscope objective falls on the turntable of the rectangular slots and the image space focus falls on the scanning slot assembly. The present invention is especially suitable for large aperture optical system.
Description
1. Technical field [0001] The invention belongs to a spectral plane coordinate calibration device of a digital scanning optical transfer function tester related to the technical field of optical inspection. 2. Technical background [0002] To evaluate the imaging quality of an optical system, the most comprehensive and accurate method is to use an optical transfer function tester to test the optical transfer function value of the optical system. Whether the optical transfer function value is accurate depends on whether the optical transfer function tester's spectral plane coordinate position is accurate. Therefore, before testing the imaging quality of the optical system, the spectral coordinates of the optical transfer function tester must be accurately calibrated. Before the present invention, the calibration of the spectral plane coordinates of the optical transfer function tester is usually performed with a patchwork loose device, and the prior art closest to the presen...
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IPC IPC(8): G01N21/00G02B21/00G02B21/36
Inventor 张晓辉马冬梅
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI