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Auto-collimation interference measurement system for three dimensional angular distortion of object

A technology of interferometry and self-collimation, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems that the background technology cannot measure three-dimensional angle deformation, etc., and achieve the effects of improved precision, simple structure of the optical system, and easy realization

Inactive Publication Date: 2005-01-26
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the problem that the background technology cannot measure three-dimensional angular deformation, the purpose of the present invention is to provide a self-collimation interferometry system capable of measuring three-dimensional angular deformation

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  • Auto-collimation interference measurement system for three dimensional angular distortion of object
  • Auto-collimation interference measurement system for three dimensional angular distortion of object

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Embodiment Construction

[0013] The invention presses figure 2 The schematic diagram shown is implemented. The first light source 1, the diaphragm 2, the first dichroic prism 3, the second dichroic prism 4, the third dichroic prism 5, the objective lens group 6, the reflecting mirror 7, and the CCD detector 8 form a main optical path; by the second light source 9 , Grating 10, third beam splitting prism 5, objective lens group 6, reflecting mirror 7, second beam splitting prism 4, grating 11 and CCD detector 12 form another main optical path; second beam splitting prism 4, third beam splitting prism 5, objective lens Group 6, grating mirror 7 is the common optical path part of the two main optical paths.

[0014] The first light source 1 can be an infrared light source; the diaphragm 2 can be a small aperture diaphragm; the first dichroic prism 3, the second dichroic prism 4, the third dichroic prism 5, and the reflecting mirror 7 can be made of K9 glass, which are made of two Three prisms are glued toget...

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Abstract

This invention belongs to photoelectricity measuring technique field and relates to a self-collimation intervention measuring system which comprises 1 Number one light source, 2 diaphragm, 3 Number one beam splitter, 4 Second beam splitter, 5 Third beam splitter, 6 object lens group, 7 reflectoscope, 8 CCD detector, 9 Second light source, 10 self-collimation grating, 11 aiming grating, 12 CCD detector. The invention provides a new method for measuring the three-dimensional deformation of an object based on the principle of self-collimation intervention and solves the problem that background technique can't measure the three-dimensional deformation of an object. There are two main light paths in the self-collimation intervention system of this invention and one is self-collimation light path which can measure the two-dimensional deformation of an object and the other is grating invention light path which can measure one-dimensional deformation of a object. And the accuracy of the deformation measured is improved with the increase of the grating frequency by the use of grating invention.

Description

Technical field [0001] The invention belongs to the field of photoelectric measurement technology, and relates to a self-collimating interferometric measurement system. Background technique [0002] The self-collimation method can measure the small-angle deformation of an object, but it is commonly used to measure one-dimensional or two-dimensional angular deformation. The self-collimation method can only measure two-dimensional angular deformation at most. [0003] The existing technology closest to the present invention is the mature photoelectric auto-collimation measurement system, and its principle is as follows figure 1 As shown, it is composed of a light source 1, a diaphragm 2, a beam splitting prism 3, an objective lens group 4, a reflecting mirror 5 and a detector 6. [0004] This photoelectric auto-collimation measurement system can only measure the one-dimensional angular deformation of the object or the two-dimensional angular deformation of the object, but it canno...

Claims

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Application Information

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IPC IPC(8): G01B11/26
Inventor 乔彦峰李向荣李清安郭平平张尧禹
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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