Method for producing stamper for optical information recording medium
A technology for recording media and manufacturing methods, which is applied in the fields of optical record carrier manufacture, optical record carrier, recording/reproduction by optical methods, etc., and can solve problems such as damage to concave-convex patterns, inability to impart concave-convex patterns to metal layers, and inability to perform perfectly , to achieve a good plating effect
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Embodiment approach 1
[0032] As Embodiment 1, refer to Figure 1 ~ Figure 3 , a method of manufacturing a stamper including a step of forming an organic layer on the surface of a master disk by a spin coating method will be described. First, refer to figure 1 (A) to (F) describe the outline of the stamper manufacturing method according to Embodiment 1 of the present invention.
[0033] First, if figure 1 As shown in (A), a recording light 4 such as a laser or an electron beam is used to expose the original recording disk 3 on which a film-like resist 2 is formed on the substrate 1 to form guide grooves and information pits as the latent phase 5. Graphics (exposure process). Here, the resist 2 contains an inorganic material that undergoes a phase change due to exposure to temperature rise. Then, if figure 1 As shown in (B), by performing a development process on the exposed recording original disk 3, the original disk 6 having a fine concave-convex pattern in which the desired pattern record...
Embodiment approach 2
[0061] As Embodiment 2, a method of manufacturing a stamper including a step of forming an organic layer on the surface of a master disk by a vacuum vapor deposition method will be described. The manufacturing method of Embodiment 2 is the same as the manufacturing method of Embodiment 1 except for the formation method of the organic layer. Therefore, in the following description, in order to avoid repeated description, refer to figure 1 (A) to (F) mainly describe differences from Embodiment 1. FIG.
[0062] In the second embodiment, the exposure step and the development step are the same as those in the first embodiment, so the same original disk as the original disk 6 produced in the first embodiment is produced.
[0063] In the organic layer formation process (refer to figure 1 In (C)), the organic layer 7 is formed on the master disk 6 by vacuum evaporation. When the vacuum vapor deposition method is used, the uneven pattern on the master disk 6 can be formed on the s...
Embodiment approach 3
[0076] As Embodiment 3, a method of manufacturing a stamper including a step of forming an organic layer on the surface of a master by a vapor deposition polymerization method will be described. The manufacturing method of Embodiment 3 is the same as the manufacturing methods of Embodiments 1 and 2 except for the formation method of the organic layer. Therefore, in the following description, in order to avoid repeated description, refer to figure 1 (A) to (F) mainly describe differences from Embodiments 1 and 2.
[0077] In Embodiment 3, the exposure step and the development step are the same as those in Embodiments 1 and 2, and therefore, the same original disk as the original disk 6 prepared in Embodiments 1 and 2 is produced.
[0078] In the organic layer formation process (refer to figure 1 In (C)), the organic layer 7 is formed on the master disk 6 by a vapor deposition polymerization method. Here, the vapor deposition polymerization method is a kind of vacuum vapor ...
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Abstract
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