Composite scab structure and producing method thereof
A technology of bumps and polymers, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve problems such as deformation
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[0039] like Figure 4 As shown, the composite bump structure of this embodiment includes the following elements: a contact pad 402 is located on a substrate 400, such as a semiconductor substrate, electrodes (not shown) are formed on the substrate 400, and the contact pad 402 and The electrodes are electrically connected. The main part 404 is composed of a polymer, located on the substrate 400. The above-mentioned polymer is preferably a high molecular polymer, more preferably a high molecular polymer with a thermal expansion coefficient similar to that of metals such as aluminum and gold, and a good bond with the metal. .
[0040] The composite bump structure of this embodiment further includes at least one conductive plug 406 located in the main body portion 404 . In detail, the above-mentioned conductive plug 406 runs through the entire main body portion 404 ; and a conductive layer 408 is located on the main body portion 404 , wherein the conductive layer 408 is electric...
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