Method for catalytic synthetic growth InN nano point using In metal nano point
A technology of metal nano and nano dots, applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems that the research of InN nano dots or quantum dot materials has not been carried out
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[0017] The invention utilizes a MOCVD (metal organic chemical vapor phase epitaxy) epitaxial growth system, adopts a metal In nano-dot catalytic synthesis technology to grow InN nano-dots / quantum dot materials, and obtains InN nano-dots.
[0018] Specifically include the following steps:
[0019] 1. Surface cleaning and treatment of sapphire (0001) substrate. Clean the blue with trichlorethylene, acetone, and ethanol, respectively
[0020] Gem (0001) substrate, with H 2 SO 4 : HNO 3 (1:1) it was boiled at 200°C with H 3 PO 4 :H 2 SO 4 (1:3) etched it for 20 minutes. Then, rinse with deionized water and dry the surface with an infrared lamp.
[0021] 2. Heat treatment and nitriding of the sapphire (0001) substrate after it is placed in the growth chamber. The cleaned substrate
[0022] Put it into the growth chamber, first treat it in a hydrogen atmosphere at 900°C for 10 minutes, and then carry out nitriding treatment on the substrate in an ammonia atmosphere for 30...
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