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Flat panel display and method of manufacturing the same

A flat-panel display and capacitor area technology, applied in semiconductor/solid-state device manufacturing, static indicators, instruments, etc., can solve problems such as reduction of capacitor aperture ratio, additional processes, etc.

Inactive Publication Date: 2005-09-14
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, forming a thicker portion of the interlayer insulating layer 160 and a thinner portion of the interlayer insulating layer 160 requires additional processes.
Likewise, increasing the surface area of ​​a capacitor for high capacitance results in a decrease in the aperture ratio

Method used

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  • Flat panel display and method of manufacturing the same
  • Flat panel display and method of manufacturing the same
  • Flat panel display and method of manufacturing the same

Examples

Experimental program
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Embodiment Construction

[0042] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like parts throughout.

[0043] Hereinafter, the flat panel display of the present invention will be described focusing on the organic EL display.

[0044] 2A to 2D are cross-sectional views showing a process of manufacturing an organic EL display according to a first embodiment of the present invention.

[0045] Referring to FIG. 2A , a buffer layer 240 is formed on a transparent insulating substrate 200 . The transparent insulating substrate 200 includes first, second and third regions 210, 220 and 230, which are preferably made of glass. The buffer layer 240 is preferably fabricated from an oxide layer.

[0046] A semiconductor layer 211 is formed on the buffer layer 240 on the first region 210 . The semiconductor layer 211 is preferably made of polysilicon. A gate insulating layer 250 is fo...

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PUM

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Abstract

A flat panel display device having a high capacitance and a high aperture ratio. A thin film transistor and a capacitor are formed on an insulating substrate. The thin film transistor includes a semiconductor layer, a gate electrode and source and drain electrodes. The capacitor has first and second capacitor electrodes and a dielectric layer. An insulating layer is formed over the transistor to insulate the gate electrode from the source and drain electrodes, and a portion of the insulating layer is formed as the dielectric layer between the first and second capacitor electrodes. A non-planar shape of the first capacitor electrode and a conforming shape of the dielectric layer and a second capacitor electrode increase a capacitance of the capacitor. The portion of the insulating layer serving as the capacitor dielectric is formed to be thinner than the portion of the insulating layer formed over the gate electrode.

Description

[0001] This application is a divisional application of the No. 02156956.8 invention patent application entitled "Flat Panel Display and Its Manufacturing Method" filed on August 6, 2002. technical field [0002] The invention relates to a flat panel display and a manufacturing method thereof. Background technique [0003] The flat panel display includes a liquid crystal display (LCD), an organic electroluminescence (EL) display, a plasma display panel (PDP), and the like. Among these, LCD and organic EL displays include a plurality of pixels having transistors and capacitors. [0004] Methods of increasing capacitor capacity include increasing the size of the surface area of ​​the capacitor, reducing the thickness of the capacitor's dielectric layer, and using a material with a high dielectric constant as the dielectric layer. [0005] Among these methods of increasing the capacitor capacity, the method of increasing the size of the surface area of ​​the capacitor reduces t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B33/10H01L21/336H01L21/77H01L21/84H01L27/12H01L27/13H01L27/32
CPCH01L29/66757H01L27/3244H01L27/1214H01L27/13H01L27/1288H01L27/12H01L27/1248H01L27/1255H10K59/1216H05B33/10H10K59/12
Inventor 徐诚模具在本
Owner SAMSUNG DISPLAY CO LTD