Core kernel modeling method for micro inertial sensor device and core kernel base

A technology of inertial sensor and modeling method, which is applied in the field of micro-electromechanical system design, can solve the problems of inconvenient integration of mixed-signal simulation, reusable core modeling without relevant literature reports, etc.
CN1673751AInactive Publication Date: 2005-09-28NORTHWESTERN POLYTECHNICAL UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
NORTHWESTERN POLYTECHNICAL UNIV
Publication Date
2005-09-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The micro inertial sensor kernel mold establishing method and kernel library belongs to the field of design technology of micro electromechanical system. Technologically, the present invention features that electromechanical micro structure behavior mold is first established by means of combined mechanical behavior mold establishing method and force coupling behavior mold establishing method and reusable kernel for micro inertial sensor is then formed according to kernel mold establishing method. The present invention also includes kernel library established based on the said method, the establishment of parameter kernel molds for typical functional structural parts of MEMS inertial devices in 3D space, and kernel library as the integration of kernel molds. The present invention has universal theoretical significance and may provide technological support for research and development of micro gyro, micro accelerometer, etc.
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Description

Technical field:

[0001] The invention relates to a core modeling method of a miniature inertial sensor device and a core library thereof, belonging to the design field of micro-electromechanical systems. It is a computer-aided design for inertial micro-electromechanical systems and typical electrostatic micro-actuators and electrostatic detection micro-sensors. Background technique:

[0002] Inertial sensing devices based on MEMS technology, such as micro-accelerometers, micro-gyroscopes, and micro-inertial measurement combinations, are important types of MEMS device research. The micro-inertial sensor device based on MEMS technology is a system integrating circuit and micro-mechanical structure. The modeling and simulation analysis of its overall behavior (system-level behavior) is the focus and difficulty of its computer-aided design. The modeling method based on the reusable core (Intellectual Property, IP) is an effective method to realize the system-level modeling of M...

Claims

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