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Liquid crystal display with transparent conductive film on coated formed sandwich insulation film

A liquid crystal display, transparent conductive film technology, applied in instruments, nonlinear optics, optics, etc., can solve problems such as total resistance change

Inactive Publication Date: 2006-01-04
NEC LCD TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the total resistance of the common wiring conductor inevitably becomes high

Method used

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  • Liquid crystal display with transparent conductive film on coated formed sandwich insulation film
  • Liquid crystal display with transparent conductive film on coated formed sandwich insulation film
  • Liquid crystal display with transparent conductive film on coated formed sandwich insulation film

Examples

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no. 1 example

[0070] Fig. 1 is a schematic plan view illustrating the structure of a TFT substrate of a transmissive liquid crystal display according to a first embodiment of the present invention. The TFT substrate 10 shown in FIG. 1 is made to face each other with an opposing substrate 17 mentioned later, and a liquid crystal material is filled in the space between the TFT substrate 10 and the opposing substrate 17 to form a liquid crystal display. LCD panel (see Figure 2 and Figure 4).

[0071] On the surface of the TFT substrate 10 facing the opposite substrate 17 side, a plurality of signal lines 11 and a plurality of scanning lines 12 intersecting the signal lines 11 are arranged in a grid shape. In the vicinity of each intersection of one of the signal lines 11 and one of the scanning lines 12, a TFT 13 is formed. The TFTs 13 are thus arranged in a matrix.

[0072] In this embodiment, the TFT 13 constitutes a high-resolution liquid crystal display panel having a CF (color filter on...

no. 2 example

[0116] FIG. 10 is a schematic plan view illustrating the structure of a TFT substrate 50 in a transmissive liquid crystal display according to a second embodiment of the present invention. As shown in FIG. 10 , on the surface of the TFT substrate 50 on the opposite substrate side not shown in the drawings, a plurality of signal lines 11 and a plurality of signal lines 11 intersecting with the signal lines 11 are arranged in a grid shape. scan line 12. In the vicinity where one of the signal lines 11 intersects with one of the scanning lines 12, a TFT 13 is formed. Thus, the TFTs 13 are arranged in a matrix.

[0117] A common wiring conductor, that is, a common wiring 51 is also provided between adjacent scanning lines 12 . In a common storage type liquid crystal display, the common wiring conductor 51 and the pixel electrode form a storage capacitor.

[0118] The common wiring conductors 51 are coupled to each other to have a common potential applied thereto. Therefore, on...

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Abstract

One kind of LCD is made, which has lattice buses, switch elements coupled to the buses, and pixel electrodes set on coating formed insulating film and coupled to the switch elements. During making the LCD, the transparent conducting film is formed on the sandwiched insulating film at the substrate temperature controlled at 100-170 deg.c. Or, the transparent conducting film is formed on the sandwiched insulating film under the conditions of no-heating state and oxygen flow rate ratio controlled in 1 % or lower, and the formed transparent conducting film is then annealed. Therefore, when ITO film is etched on the sandwiched insulating film, no corrosive residue is generated. In addition, the contact resistance between the ITO film and the lower metal layer is reduced to avoid display fault.

Description

technical field [0001] The present invention relates to a liquid crystal display and a manufacturing method thereof. More specifically, the present invention relates to a liquid crystal display having a high-resolution display panel in which an insulating film formed by coating, for example, an organic film or the like is used as an interlayer insulating film. Background technique [0002] In general, a transparent type liquid crystal display in which a thin film transistor (TFT) or a metal insulator insulator (MIM) device is used as an initial element for driving and controlling each pixel is widely used. [0003] Fig. 22A is a partially enlarged plan view showing a pixel portion of an active matrix substrate of a conventional transmissive liquid crystal display using TFT disclosed in Japanese Patent Laid-Open Publication No. 9-152625. Fig. 22B is a cross-sectional view taken along line B-B of Fig. 22A. In the active matrix substrate of the transparent liquid crystal disp...

Claims

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Application Information

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IPC IPC(8): G02F1/1333
Inventor 木村茂前田明寿土居悟史石野隆行
Owner NEC LCD TECH CORP
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