Round comb type minisize electric field sensor
An electric field sensor and sensor technology, applied in the field of sensors, can solve the problems of poor portability, high manufacturing precision requirements, and complicated installation.
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[0012] The circular comb-tooth miniature electric field sensor is mainly composed of three parts: comb-shaped fixed electrode 1 , comb-shaped shielding electrode 2 and sensing electrode 3 . The comb-shaped fixed electrode 1 and the comb-shaped shielding electrode 2 are made of conductive material with grid holes 4 opened thereon. The excitation signal of the sensor is input by the comb-shaped fixed electrode 1 and the comb-shaped shield electrode 2 , and the induction signal is output by the induction electrode 3 . Comb-shaped fixed electrode 1 and comb-shaped shielding electrode 2 are excited by comb-shaped driving, so that comb-shaped shielding electrode 2 and sensing electrode 3 undergo periodic relative motion, that is, vibration is generated along the normal direction in FIG. 2 . The structure of the circular comb-tooth miniature electric field sensor is as follows: figure 1 As shown, it consists of three parts: comb-shaped fixed electrode 1 , comb-shaped shield electrod...
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