Photosensitive resin composition and dry film resist using the same

A technology of photosensitive resin and composition, which is applied in the field of dry film resist and alkali-soluble photosensitive resin composition, can solve the problems of destroying the storage stability of the composition, instability of the viscosity enhancer, etc., achieve excellent storage stability, improve High effect of adhesion, heat resistance and chemical resistance
CN1784633AInactive Publication Date: 2006-06-07DONGJIN SEMICHEM CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
DONGJIN SEMICHEM CO LTD
Publication Date
2006-06-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates to an alkali-soluble photosensitive resin composition and a dry film resist using the photosensitive resin composition, and more particularly to a resist having excellent heat resistance by including an acrylate resin effective for improving adhesion. , chemical resistance, and long-term stability, and a photosensitive resin composition having excellent adhesion to Cu or ITO (indium tin oxide) substrates, and a photosensitive dry film resist using the photosensitive resin composition.
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Description

technical field

[0001] The present invention relates to an alkali-soluble photosensitive resin composition and a dry film resist using the photosensitive resin composition, more particularly, to a photosensitive resin composition for etching a Cu substrate or an ITO substrate and using the photosensitive resin composition Composition of dry film resists. Background technique

[0002] With the recent high integration of electronic equipment, the demand for highly integrated circuits with narrow wiring and insulating region patterns is increasing. And, demand for dry film resists having excellent heat resistance, chemical resistance, and long-term stability is also increasing.

[0003] Conventional dry film resists are limited in adhesion and solubility to substrates. In order to overcome these problems, viscosity enhancers such as silane coupling agents are used.

[0004] However, since the viscosity enhancer itself is unstable, it tends to impair the storage stability of ...

Claims

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