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Manufacturing control systems using radio frequency identification

A technology of radio frequency identification and manufacturing control, applied in general control system, control/adjustment system, program control, etc., can solve problems such as staff danger and error, and achieve the effect of avoiding control errors

Inactive Publication Date: 2006-07-12
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This mode of operation often leads to errors and may cause danger to workers due to the automatic activation of transport devices such as robotic arms

Method used

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  • Manufacturing control systems using radio frequency identification
  • Manufacturing control systems using radio frequency identification

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Embodiment Construction

[0019] In order to make the purpose, features and advantages of the present invention more obvious and understandable, the preferred embodiments are specially cited below, together with the attached drawings figure 1 and figure 2 , give a detailed explanation. The description of the present invention provides different examples to illustrate the technical features of different implementations of the present invention. Wherein, the configuration of each element in the embodiment is for illustration, not for limiting the present invention. In addition, part of the symbols in the figures in the embodiments are repeated for the purpose of simplifying the description, and do not imply the relationship between different embodiments.

[0020] Please refer to figure 1 , which shows a schematic diagram of a manufacturing system according to an embodiment of the present invention. The implementation of the present invention will be described by taking the semiconductor manufacturin...

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Abstract

The invention provides a system for manufacturing control using radio frequency identification (RFID), which includes a trigger, a RFID interrogator, a controller and an indicator, wherein the trigger issues a trigger signal when activated by user contact; the RFID interrogator retrieves information from a RFID tag when activated; the controller is configured to activate the RFID interrogator, get the relative information from associated systems and control the indicator according to the trigger signal; the indicator provides operating status of the RFID interrogator and / or information getting from the controller. The system can use the radio frequency identification induction operation to control in the way of touch control to avoid the control mistake.

Description

technical field [0001] The present invention relates to production control for semiconductor manufacturing environments, and more particularly to systems and methods for production control using radio frequency identification sensing operations. Background technique [0002] In the fab, each wafer batch is marked with a wafer batch number, and each processing machine selects the corresponding process processing program (recipe) according to the wafer batch number to process the wafer. processing. The confirmation of the wafer batch number is even more important in the automated wafer processing machine. The wrong identification or input of the wafer batch number will cause the machine to use inappropriate process processing procedures for wafer processing. Wafer products that have been processed by wrong process procedures need to be reprocessed at least, and cannot be recovered and must be destroyed at worst. Whether it is reprocessing or destruction, it will cause the co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06K7/01H01L21/00H01L21/66
CPCG05B19/4183G05B19/128G05B2219/45031G05B2219/31322Y02P90/02
Inventor 吴宏益游瑛准廖鸿文
Owner TAIWAN SEMICON MFG CO LTD
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