Ultrasonic electrolysis compounding micro processing method and device

A microfabrication and electrical machining technology, applied in the direction of electric processing equipment, metal processing equipment, circuits, etc., can solve problems such as unsustainability, efficiency, precision reduction, tool loss, etc.

Inactive Publication Date: 2006-08-30
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides an ultrasonic electrolysis composite micromachining method and device. The two methods of ultrasonic electrolysis and electrolysis are organically combined to maximize strengths and circumvent weaknesses. , the problem of significant re

Method used

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  • Ultrasonic electrolysis compounding micro processing method and device
  • Ultrasonic electrolysis compounding micro processing method and device
  • Ultrasonic electrolysis compounding micro processing method and device

Examples

Experimental program
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Effect test

example 1

[0034] Example 1: φ0.20mm micro-axis cathode processes micro-holes on YT cemented carbide

[0035] The processing process starts with the cathode production: the horn is processed by multi-axis linkage numerical control machining method, the shape of the cathode of the tool is preliminarily processed, and the connecting thread of the two is finished after finishing, and the coupling is performed with castor oil; after the horn and the cathode are connected with precision threads , and then use the micro-combined electric machining method for finishing; on the four-axis linkage precision EDM machine tool, the sheet electrode is used to feed in the x-direction and y-direction, and it is equipped with the spindle rotation micro-discharge method, which can process the axial without taper. φ0.20mm fine shaft cathode.

[0036] Fix the YT cemented carbide material on the micro-table insulated from the device with double-sided adhesive, connect the fine cathode and the horn after fini...

example 2

[0042] Example 2: Using a φ3.0mm cylindrical cathode with a φ0.60mm inner hole to process a fine shaft on a YG cemented carbide

[0043] As above, the cathode is first produced in the processing process, and the horn is processed by multi-axis linkage numerical control machining method. On the precision electric discharge machine tool, the chip electrode is fed in the x direction and the y direction, and it is equipped with the spindle rotating fine discharge method, which can process the φ3.0mm fine shaft cathode without taper; the φ0.60mm inner hole at the end of the cathode can be made The fine shaft slightly smaller than φ0.60mm is used as the electrode for electrical discharge machining again;

[0044] Adopt DC voltage 2V, abrasive 1600# silicon carbide; static pressure 0.80N; abrasive suspension concentration 20%; electrolyte is 4% sodium nitrate aqueous solution, use φ3.0mm with φ0.60mm inner hole on hard alloy YG15 The cylindrical cathode is processed by ultrasonic el...

example 3

[0048] Example 3 Machining a cross rib cube structure on cemented carbide with a cross groove with a width of 0.2×0.4mm

[0049] In the same way: the machining process starts with the cathode production: the horn is processed by the multi-axis linkage numerical control machining method, the shape of the cathode of the tool is preliminarily processed, and the connecting thread of the two is finished by finishing machining; after the horn and the cathode are connected with threads, the The method of fine combination electric machining is used for finishing; on the four-axis linkage precision electric discharge machine tool, the sheet electrode is used to feed in x direction and y direction, and it is equipped with the spindle rotating fine discharge method, which can process φ3.0mm without taper in the axial direction. The micro-axis cathode, with a width of 0.2×0.4mm, is precisely processed by slow wire cutting.

[0050] Using pulse voltage with amplitude 3V, frequency 5000HZ, ...

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Abstract

The present invention relates to an ultrasonic and electrolytic combined microfine machining method and its equipment. Said invention can make ultrasonic machining method and electrolytic machining method be organically combined together to implement machining of microdevice. Said equipment includes the following several portions: electrolyzer, ultrasonic vibration drive device, working table, micropressure regulation and Z-direction automatic feeding measurement device and electrolytic current measurement analysis device. Besides, said invention also provides the working principle and concrete steps of said method.

Description

[0001] Field [0002] The ultrasonic electrolysis composite micromachining method and device of the invention belong to the field of composite micromachining. Background technique [0003] In the field of microfabrication, there are many microfabrication methods and corresponding processing equipment. However, the existing microfabrication methods have certain limitations while each has its own advantages. For example: the surface layer quality, processing accuracy and efficiency of micro-EDM are restricted by the discharge mechanism; laser processing is thermal processing, and thermal factors have a great influence on the accuracy; electron beam and ion beam processing must be carried out in a vacuum, and equipment investment costs Too high; Ultrasonic machining has high machining accuracy and efficiency for hard and brittle materials with special-shaped small holes and grooves, but the tool is lossy, especially when machining parts with high depth ratio and when the materia...

Claims

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Application Information

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IPC IPC(8): B23H5/08B23H5/10B23H7/14
Inventor 朱永伟云乃彰沈茂松陈安骏吴冰洁
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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