Dual-axis capacitance type micromechanical accelerometer

A technology of capacitive micromachines and accelerometers, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, measuring devices, etc., can solve the problems of insufficient sensitivity and resolution, achieve improved sensitivity, high resolution, and realize overload protection Effect

Inactive Publication Date: 2006-10-11
BEIHANG UNIV
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  • Abstract
  • Description
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Problems solved by technology

[0003] The technology of the present invention solves the problem: overcomes the deficiencies of the prior art, and provides a high-precision dual-axis capacitive micro-machined accelerometer to solve the problems that the existing micro-machined accelerometers are mostly single-axis, and the sensitivity and resolution are not high enough. Achieve high-precision two-dimensional acceleration measurement

Method used

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  • Dual-axis capacitance type micromechanical accelerometer

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Embodiment Construction

[0008] Such as figure 1 As shown, the present invention includes substrate 1, mass block 2, elastic support, drive electrode and detection electrode, tooth hub 15, 25, 35, 45, tooth hub 15, 25, 35, 45, stopper 17, 27, 37 , 47. The anchor points 16, 26, 36, 46 are connected to the substrate 1 through bonding, the structure is center-symmetrical, and a mass 2 is used to sense accelerations in two orthogonal directions. The mass block 2 is located in the center of the structure, and the periphery of the mass block 2 is elastic support, stoppers 17, 27, 37, 47, tooth hubs 15, 25, 35, 45, drive electrodes and detection electrodes. The elastic support is composed of four double-ended fixed beams 12, 22, 32, 42 and four cantilever beams 11, 21, 31, 41, and the four double-ended fixed beams 12, 22, 32, 42 form a square. The four corners are anchor points 16,26,36,46. One end of each cantilever beam 11 , 21 , 31 , 41 is fixedly connected to the mass block 2 , and the other end is fix...

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Abstract

The invention discloses a dual-axle capacitor micro mechanical accelerometer, which comprises a basic plate, a weigh block, a flexible support, a driving electrode, a detecting electrode, a tooth axle and a backstop, while it uses the weight block to sense the accelerators at two orthogonal directions. Wherein, the weight block is at the center of said device, while the flexible support, backstop, driving electrode, and detecting electrode are outside the weight block; the flexible support can realize decouple in two orthogonal directions to improve the sensitivity and resolution in said two directions; the flexible support uses the four corners of square as anchor points, with better structure stability; and it uses comb capacitor to realize differential static driving and capacitor detection, to improve the sensitivity and resolution of accelerator. The invention can easily realize two-dimension accelerator detection with high accuracy.

Description

technical field [0001] The invention relates to a capacitive micro-machine accelerometer, in particular to a two-axis capacitive micro-machine accelerometer, which belongs to the field of micro-mechanical sensors in micro-electro-mechanical systems (MEMS). It is widely used as a micro-inertial device in automotive electronics, aerospace, and weapons. equipment etc. Background technique [0002] MEMS is in the development period, its technology and market are not yet mature, but its broad development prospects, huge social and economic benefits are well known to the world, and the micro-mechanical accelerometer is the most successful representative. The research on micro-machined accelerometers began in the early 1970s, and formed single-axis micro-machined accelerometer products in the 1980s. In the late 1990s, multi-axis micro-machined accelerometers appeared. The most representative one on the market is the American AD The company's ADXL series of micromachined accelerome...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P2015/082
Inventor 樊尚春任杰
Owner BEIHANG UNIV
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