Automatic aligning device for scribing machine platform datum

An automatic alignment and dicing machine technology, applied in automatic control devices, feeding devices, metal processing machinery parts, etc., can solve the problems of large maintenance workload, large positioning error, easy to be interfered, etc. Easy operation and long service life effect

Inactive Publication Date: 2007-01-03
SHENYANG ACAD OF INSTR SCI
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a dicing machine platform reference automatic alignment device, which has a reasonable structural design and solves the defects of large positioning errors, easy interference, high cost, and heavy maintenance workload in the prior art.

Method used

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  • Automatic aligning device for scribing machine platform datum
  • Automatic aligning device for scribing machine platform datum

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Embodiment Construction

[0014] according to Figure 1-2 The composition and working process of the present invention are described in detail. The device includes a main shaft base 10, a main shaft 5 with a cutting head assembled on the main shaft base 10, a cutting reference platform 2, its transmission device and an automatic control system. The automatic control system in the device includes a pneumatic control circuit, an electric control circuit and an alignment circuit for controlling the action of the main shaft with the cutting head, the cutting reference platform and its transmission device. Among them, the main shaft base 10, the main shaft 5, the cutting head composed of the mounting frame 3 assembled on the main shaft and the ultra-thin grinding wheel blade 4 on the main shaft, the cutting reference platform 2 fixed on the insulating plate 1 and its transmission device and automatic control The structure of the pneumatic control circuit and the electric control circuit in the system is ba...

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Abstract

The automatic aligning device for scribing machine platform datum includes a main shaft seat, a main shaft carrying cutting head, a cutting datum platform and its driving device and an automatic control system. The technological features include the aligning circuit of the automatic control system with aligning point JK connected to the conductor connected to the main shaft and the aligning point PT connected to the conductor connected to the datum platform fixed onto the datum platform, and the PLC connected to the aligning points through wires, relay, step motor driver, optoelectronic isolator and starting button. The present invention has reasonable structure, easy operation and convenient regulation, can realize the automatic aligning of the scribing machine platform datum to ensure high cutting quality.

Description

technical field [0001] The present invention relates to a platform reference automatic alignment technology, especially an automatic and efficient dicing machine platform automatic alignment device integrating automatic control technology, digital electronic technology, mechanical design and manufacturing technology. The tool setting accuracy is 0.003 within mm. It is suitable for the automatic calibration process of the benchmark of the dicing machine platform, and can also be used for the automatic calibration process of other similar equipment. Background technique [0002] Grinding wheel dicing machine is a special cutting equipment for processing various semiconductor wafer substrates and other similar substrates. It is an important equipment in the semiconductor production process, mainly used for semiconductor chips, thermistors, and B-ultrasound transducers. , Solar cells and other products processing. Grinding wheel dicing machine is a thin-slice grinding wheel kn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q15/22
Inventor 袁慧珠张明明余胡平孙家全鞠仁忠马岩李艳丽白宇
Owner SHENYANG ACAD OF INSTR SCI
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